Molecular Layer Deposition of Thermally Stable Polybenzimidazole-Like Thin Films and Nanostructures

Saba Ghafourisaleh; Timo Hatanpaa; Anton Vihervaara; Kenichiro Mizohata; Marko Vehkamaki; Markku Leskela; Matti Putkonen; Mikko Ritala

doi:10.1002/admi.202200370

Molecular Layer Deposition of Thermally Stable Polybenzimidazole-Like Thin Films and Nanostructures

Saba Ghafourisaleh, Timo Hatanpaa, Anton Vihervaara, Kenichiro Mizohata, Marko Vehkamaki, Markku Leskela, Matti Putkonen, Mikko Ritala

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Article number	2200370
Journal	Advanced Materials Interfaces
Volume	9
Issue number	15
Number of pages	12
ISSN	2196-7350
DOIs	https://doi.org/10.1002/admi.202200370
Publication status	Published - May 2022
MoE publication type	A1 Journal article-refereed

Fields of Science

molecular layer deposition
nanostructures
polybenzimidazole
VAPOR-DEPOSITION
PERFORMANCE EVALUATION
POLYMER
GROWTH
MEMBRANE
FIBERS
SPACE
METAL
ALN
116 Chemical sciences

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10.1002/admi.202200370Licence: CC BY-NC-ND

Adv Materials Inter - 2022 - Ghafourisaleh - Molecular Layer Deposition of Thermally Stable Polybenzimidazole‐Like ThinFinal published version, 3.53 MBLicence: CC BY-NC-ND

HelsinkiALD
Putkonen, M. (Manager), Ritala, M. (Manager), Mäntymäki, M. (Operator), Kemell, M. (Operator), Vehkamäki, M. (Operator) & Heikkilä, M. (Operator)
Department of Chemistry
Facility/equipment: Research Laboratory

Cite this

@article{6d56753e8cd444e9981e3a1ac3fef4fb,

title = "Molecular Layer Deposition of Thermally Stable Polybenzimidazole-Like Thin Films and Nanostructures",

keywords = "molecular layer deposition, nanostructures, polybenzimidazole, VAPOR-DEPOSITION, PERFORMANCE EVALUATION, POLYMER, GROWTH, MEMBRANE, FIBERS, SPACE, METAL, ALN, 116 Chemical sciences",

author = "Saba Ghafourisaleh and Timo Hatanpaa and Anton Vihervaara and Kenichiro Mizohata and Marko Vehkamaki and Markku Leskela and Matti Putkonen and Mikko Ritala",

year = "2022",

month = may,

doi = "10.1002/admi.202200370",

language = "English",

volume = "9",

journal = "Advanced Materials Interfaces ",

issn = "2196-7350",

publisher = "Wiley",

number = "15",

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TY - JOUR

T1 - Molecular Layer Deposition of Thermally Stable Polybenzimidazole-Like Thin Films and Nanostructures

AU - Ghafourisaleh, Saba

AU - Hatanpaa, Timo

AU - Vihervaara, Anton

AU - Mizohata, Kenichiro

AU - Vehkamaki, Marko

AU - Leskela, Markku

AU - Putkonen, Matti

AU - Ritala, Mikko

PY - 2022/5

Y1 - 2022/5

KW - molecular layer deposition

KW - nanostructures

KW - polybenzimidazole

KW - VAPOR-DEPOSITION

KW - PERFORMANCE EVALUATION

KW - POLYMER

KW - GROWTH

KW - MEMBRANE

KW - FIBERS

KW - SPACE

KW - METAL

KW - ALN

KW - 116 Chemical sciences

U2 - 10.1002/admi.202200370

DO - 10.1002/admi.202200370

M3 - Article

SN - 2196-7350

VL - 9

JO - Advanced Materials Interfaces

JF - Advanced Materials Interfaces

IS - 15

M1 - 2200370

ER -

Molecular Layer Deposition of Thermally Stable Polybenzimidazole-Like Thin Films and Nanostructures

Fields of Science

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Equipment

HelsinkiALD

Cite this