@article{6d56753e8cd444e9981e3a1ac3fef4fb,
title = "Molecular Layer Deposition of Thermally Stable Polybenzimidazole-Like Thin Films and Nanostructures",
keywords = "molecular layer deposition, nanostructures, polybenzimidazole, VAPOR-DEPOSITION, PERFORMANCE EVALUATION, POLYMER, GROWTH, MEMBRANE, FIBERS, SPACE, METAL, ALN, 116 Chemical sciences",
author = "Saba Ghafourisaleh and Timo Hatanpaa and Anton Vihervaara and Kenichiro Mizohata and Marko Vehkamaki and Markku Leskela and Matti Putkonen and Mikko Ritala",
year = "2022",
month = may,
doi = "10.1002/admi.202200370",
language = "English",
volume = "9",
journal = "Advanced Materials Interfaces ",
issn = "2196-7350",
publisher = "Wiley",
number = "15",
}