NbCl5 as a precursor in atomic layer epitaxy

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
JournalApplied Surface Science
Volume82-83
Pages (from-to)468-474
ISSN0169-4332
Publication statusPublished - 1994
MoE publication typeA1 Journal article-refereed

Fields of Science

  • 116 Chemical sciences

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