Nondestructive Inspection of Buried Channels and Cavities in Silicon

Ivan Kassamakov; Kestutis Grigoras; Ville Heikkinen; Kalle Hanhijarvi; Juha Aaltonen; Sami Franssila; Edward Haeggstrom

doi:10.1109/JMEMS.2012.2227460

Nondestructive Inspection of Buried Channels and Cavities in Silicon

Ivan Kassamakov, Kestutis Grigoras, Ville Heikkinen, Kalle Hanhijarvi, Juha Aaltonen, Sami Franssila, Edward Haeggstrom

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Journal	IEEE Journal of Microelectromechanical Systems
Volume	22
Issue number	2
Pages (from-to)	438-442
Number of pages	5
ISSN	1057-7157
DOIs	https://doi.org/10.1109/JMEMS.2012.2227460
Publication status	Published - Apr 2013
MoE publication type	A1 Journal article-refereed

Fields of Science

Infrared (IR) imaging
microelectromechanical systems
optical interferometry
thickness measurement
MICRO-CHANNELS
FABRICATION
SU-8
MICROSTRUCTURES
SYSTEMS
114 Physical sciences

Access to Document

10.1109/JMEMS.2012.2227460

Cite this

@article{3b903808e2d64583a6b1c5ba703561cc,

title = "Nondestructive Inspection of Buried Channels and Cavities in Silicon",

keywords = "Infrared (IR) imaging, microelectromechanical systems, optical interferometry, thickness measurement, MICRO-CHANNELS, FABRICATION, SU-8, MICROSTRUCTURES, SYSTEMS, 114 Physical sciences",

author = "Ivan Kassamakov and Kestutis Grigoras and Ville Heikkinen and Kalle Hanhijarvi and Juha Aaltonen and Sami Franssila and Edward Haeggstrom",

year = "2013",

month = apr,

doi = "10.1109/JMEMS.2012.2227460",

language = "English",

volume = "22",

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publisher = "Institute of Electrical and Electronics Engineers Inc.",

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AU - Kassamakov, Ivan

AU - Grigoras, Kestutis

AU - Heikkinen, Ville

AU - Hanhijarvi, Kalle

AU - Aaltonen, Juha

AU - Franssila, Sami

AU - Haeggstrom, Edward

PY - 2013/4

Y1 - 2013/4

KW - Infrared (IR) imaging

KW - microelectromechanical systems

KW - optical interferometry

KW - thickness measurement

KW - MICRO-CHANNELS

KW - FABRICATION

KW - SU-8

KW - MICROSTRUCTURES

KW - SYSTEMS

KW - 114 Physical sciences

U2 - 10.1109/JMEMS.2012.2227460

DO - 10.1109/JMEMS.2012.2227460

M3 - Article

VL - 22

SP - 438

EP - 442

JO - IEEE Journal of Microelectromechanical Systems

JF - IEEE Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 2

ER -