Nondestructive Static and Dynamic MEMS Characterization using Supercontinuum Scanning White Light Interferometry

V. Heikkinen; K. Hanhijarvi; J. Aaltonen; K. Grigoras; I. Kassamakov; S. Franssila; E. Haeggström

doi:10.1117/12.906178

Nondestructive Static and Dynamic MEMS Characterization using Supercontinuum Scanning White Light Interferometry

V. Heikkinen, K. Hanhijarvi, J. Aaltonen, K. Grigoras, I. Kassamakov, S. Franssila, E. Haeggström

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	English
Journal	Proceedings of SPIE, the International Society for Optical Engineering
Volume	8250
Pages (from-to)	825008
Number of pages	7
ISSN	0277-786X
DOIs	https://doi.org/10.1117/12.906178
Publication status	Published - Jan 2012
MoE publication type	A4 Article in conference proceedings
Event	Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI - San Francisco, United States Duration: 21 Jan 2012 → 26 Jan 2012 Conference number: 8250

Fields of Science

Scanning White Light Interferometry
Supercontinuum
Stroboscopic
Infrared
Non Destructive Testing
OUT-OF-PLANE
114 Physical sciences

Access to Document

10.1117/12.906178

Cite this

@article{e37c81b9544a41699de16edad2037efb,

title = "Nondestructive Static and Dynamic MEMS Characterization using Supercontinuum Scanning White Light Interferometry",

keywords = "Scanning White Light Interferometry, Supercontinuum, Stroboscopic, Infrared, Non Destructive Testing, OUT-OF-PLANE, 114 Physical sciences",

author = "V. Heikkinen and K. Hanhijarvi and J. Aaltonen and K. Grigoras and I. Kassamakov and S. Franssila and E. Haeggstr{\"o}m",

note = " Volume: 8250 Host publication title: SPIE Photonics West Host publication sub-title: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI ; Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI ; Conference date: 21-01-2012 Through 26-01-2012",

year = "2012",

month = jan,

doi = "10.1117/12.906178",

language = "English",

volume = "8250",

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journal = "Proceedings of SPIE, the International Society for Optical Engineering",

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TY - JOUR

T1 - Nondestructive Static and Dynamic MEMS Characterization using Supercontinuum Scanning White Light Interferometry

AU - Heikkinen, V.

AU - Hanhijarvi, K.

AU - Aaltonen, J.

AU - Grigoras, K.

AU - Kassamakov, I.

AU - Franssila, S.

AU - Haeggström, E.

N1 - Conference code: 8250

PY - 2012/1

Y1 - 2012/1

KW - Scanning White Light Interferometry

KW - Supercontinuum

KW - Stroboscopic

KW - Infrared

KW - Non Destructive Testing

KW - OUT-OF-PLANE

KW - 114 Physical sciences

U2 - 10.1117/12.906178

DO - 10.1117/12.906178

M3 - Conference article

SN - 0277-786X

VL - 8250

SP - 825008

JO - Proceedings of SPIE, the International Society for Optical Engineering

JF - Proceedings of SPIE, the International Society for Optical Engineering

T2 - Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI

Y2 - 21 January 2012 through 26 January 2012

ER -