@inproceedings{dfaa2c84ee9a4e84a484948db17fddd8,
title = "On the Interface Quality of MIS Structures Fabricated from Atomic Layer Deposition of HfO2, Ta2O5 and Nb2O5-Ta2O5-Nb2O5 Dielectric Thin Films",
keywords = "116 Chemical sciences",
author = "Salvador Due{\~n}as and Helena Cast{\'a}n and H{\'e}ctor Garcia and Juan Barbolla and Kaupo Kukli and Mikko Ritala and Markku Leskel{\"a}",
year = "2004",
doi = "10.1557/PROC-786-E3.18",
language = "English",
series = "Materials Research Society Online Proceedings Library",
pages = "147 ",
booktitle = "Materials Research Society Symposium Proceedings",
}