Patterned films by atomic layer deposition using Parafilm as a mask

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Article numberARTN 01B102
JournalJournal of vacuum science & technology : an official journal of the American Vacuum Society
Volume36
Issue number1
Number of pages5
ISSN0734-2101
DOIs
Publication statusPublished - Jan 2018
MoE publication typeA1 Journal article-refereed

Fields of Science

  • SOLID FILMS
  • THIN-FILMS
  • NANOSCALE
  • CHEMISTRY
  • 221 Nano-technology
  • 116 Chemical sciences

Cite this

@article{046fda73c63740acb640546ca922738d,
title = "Patterned films by atomic layer deposition using Parafilm as a mask",
keywords = "SOLID FILMS, THIN-FILMS, NANOSCALE, CHEMISTRY, 221 Nano-technology, 116 Chemical sciences",
author = "Chao Zhang and Jesse Kalliom{\"a}ki and Markku Leskel{\"a} and Mikko Ritala",
year = "2018",
month = "1",
doi = "10.1116/1.5001033",
language = "English",
volume = "36",
journal = "Journal of vacuum science & technology : an official journal of the American Vacuum Society",
issn = "0734-2101",
publisher = "AVS",
number = "1",

}

Patterned films by atomic layer deposition using Parafilm as a mask. / Zhang, Chao; Kalliomäki, Jesse; Leskelä, Markku; Ritala, Mikko.

In: Journal of vacuum science & technology : an official journal of the American Vacuum Society, Vol. 36, No. 1, ARTN 01B102, 01.2018.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Patterned films by atomic layer deposition using Parafilm as a mask

AU - Zhang, Chao

AU - Kalliomäki, Jesse

AU - Leskelä, Markku

AU - Ritala, Mikko

PY - 2018/1

Y1 - 2018/1

KW - SOLID FILMS

KW - THIN-FILMS

KW - NANOSCALE

KW - CHEMISTRY

KW - 221 Nano-technology

KW - 116 Chemical sciences

U2 - 10.1116/1.5001033

DO - 10.1116/1.5001033

M3 - Article

VL - 36

JO - Journal of vacuum science & technology : an official journal of the American Vacuum Society

JF - Journal of vacuum science & technology : an official journal of the American Vacuum Society

SN - 0734-2101

IS - 1

M1 - ARTN 01B102

ER -