Original languageEnglish
JournalDiamond and Related Materials
Volume90
Pages (from-to)126-134
Number of pages9
ISSN0925-9635
DOIs
Publication statusPublished - Nov 2018
MoE publication typeA1 Journal article-refereed

Fields of Science

  • Carbon
  • Reactive ion etching
  • ICP-RIE
  • Multielectrode array
  • Neurons
  • Neuronal networks
  • MULTIELECTRODE ARRAY
  • THIN-FILMS
  • DOPAMINE
  • CHIP
  • 114 Physical sciences

Cite this

Heikkinen, Joonas J. ; Kaarela, Tiina ; Ludwig, Anastasia ; Sukhanova, Tatiana ; Khakipoor, Shokoufeh ; Kim, Sung Il ; Han, Jeon Geon ; Huttunen, Henri J. ; Rivera, Claudio ; Lauri, Sari E. ; Taira, Tomi ; Jokinen, Ville ; Franssila, Sami. / Plasma etched carbon microelectrode arrays for bioelectrical measurements. In: Diamond and Related Materials. 2018 ; Vol. 90. pp. 126-134.
@article{a9daf1b27fc349e088bd39b146a517d3,
title = "Plasma etched carbon microelectrode arrays for bioelectrical measurements",
keywords = "Carbon, Reactive ion etching, ICP-RIE, Multielectrode array, Neurons, Neuronal networks, MULTIELECTRODE ARRAY, THIN-FILMS, DOPAMINE, CHIP, 114 Physical sciences",
author = "Heikkinen, {Joonas J.} and Tiina Kaarela and Anastasia Ludwig and Tatiana Sukhanova and Shokoufeh Khakipoor and Kim, {Sung Il} and Han, {Jeon Geon} and Huttunen, {Henri J.} and Claudio Rivera and Lauri, {Sari E.} and Tomi Taira and Ville Jokinen and Sami Franssila",
year = "2018",
month = "11",
doi = "10.1016/j.diamond.2018.09.024",
language = "English",
volume = "90",
pages = "126--134",
journal = "Diamond and Related Materials",
issn = "0925-9635",
publisher = "Elsevier",

}

Plasma etched carbon microelectrode arrays for bioelectrical measurements. / Heikkinen, Joonas J.; Kaarela, Tiina; Ludwig, Anastasia; Sukhanova, Tatiana; Khakipoor, Shokoufeh; Kim, Sung Il; Han, Jeon Geon; Huttunen, Henri J.; Rivera, Claudio; Lauri, Sari E.; Taira, Tomi; Jokinen, Ville; Franssila, Sami.

In: Diamond and Related Materials, Vol. 90, 11.2018, p. 126-134.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Plasma etched carbon microelectrode arrays for bioelectrical measurements

AU - Heikkinen, Joonas J.

AU - Kaarela, Tiina

AU - Ludwig, Anastasia

AU - Sukhanova, Tatiana

AU - Khakipoor, Shokoufeh

AU - Kim, Sung Il

AU - Han, Jeon Geon

AU - Huttunen, Henri J.

AU - Rivera, Claudio

AU - Lauri, Sari E.

AU - Taira, Tomi

AU - Jokinen, Ville

AU - Franssila, Sami

PY - 2018/11

Y1 - 2018/11

KW - Carbon

KW - Reactive ion etching

KW - ICP-RIE

KW - Multielectrode array

KW - Neurons

KW - Neuronal networks

KW - MULTIELECTRODE ARRAY

KW - THIN-FILMS

KW - DOPAMINE

KW - CHIP

KW - 114 Physical sciences

U2 - 10.1016/j.diamond.2018.09.024

DO - 10.1016/j.diamond.2018.09.024

M3 - Article

VL - 90

SP - 126

EP - 134

JO - Diamond and Related Materials

JF - Diamond and Related Materials

SN - 0925-9635

ER -