Precursor Chemistry for Atomic Layer Deposition

Research output: ThesisDoctoral ThesisCollection of Articles

Original languageEnglish
Awarding Institution
  • University of Helsinki
Place of PublicationHelsinki
Publisher
Print ISBNs978-951-51-5329-6
Publication statusPublished - 2019
MoE publication typeG5 Doctoral dissertation (article)

Fields of Science

  • 116 Chemical sciences

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