Precursors for ALD processes, In: Atomic Layer Deposition of Nanostructured Materials

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review

Original language	English
Title of host publication	Precursors for ALD processes
Publication date	2012
ISBN (Print)	978-3-527-32797-3
Publication status	Published - 2012
Externally published	Yes
MoE publication type	A3 Book chapter

HelsinkiALD
Putkonen, M. (Manager), Ritala, M. (Manager), Mäntymäki, M. (Operator), Kemell, M. (Operator), Vehkamäki, M. (Operator) & Heikkilä, M. (Operator)
Department of Chemistry
Facility/equipment: Research Laboratory

Equipment