Pushing the limits of plasma ALD conformality

Matti Putkonen, M. Kariniemi, J. Niinistö, M. Vehkamäki, M. Kemell, M. Ritala, M. Leskelä, E.J. Karwacki, I. Buchanan

Research output: Book/Report › Commissioned report

Original language	English

Publication status	Published - 2011
Externally published	Yes
MoE publication type	D4 Published development or research report or study

HelsinkiALD
Putkonen, M. (Manager), Ritala, M. (Manager), Mäntymäki, M. (Operator), Kemell, M. (Operator), Vehkamäki, M. (Operator) & Heikkilä, M. (Operator)
Department of Chemistry
Facility/equipment: Research Laboratory

Equipment