Quantifying height of machined steps on copper disk using Fourier domain short coherence interferometer

Risto Montonen; Ivan Kassamakov; Edward Haeggstrom; Kenneth Osterberg

doi:10.1117/12.2184715

Quantifying height of machined steps on copper disk using Fourier domain short coherence interferometer

Risto Montonen, Ivan Kassamakov, Edward Haeggstrom, Kenneth Osterberg

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	English
Journal	Proceedings of SPIE, the International Society for Optical Engineering
Volume	9525
Number of pages	7
ISSN	0277-786X
DOIs	https://doi.org/10.1117/12.2184715
Publication status	Published - 2015
MoE publication type	A4 Article in conference proceedings
Event	Spie optical metrology / optical measurement systems for industrial inspection - Munich, Germany Duration: 22 Jun 2015 → 25 Jun 2015 Conference number: IX

Fields of Science

Compact linear collider
copper
step height
calibration
Fourier domain
short coherence
interferometry
SWEPT SOURCE OCT
ANTERIOR SEGMENT
TOMOGRAPHY
LASERS
EYE
114 Physical sciences

Access to Document

10.1117/12.2184715

Cite this

@article{12dc4cbdde1b4c1990fb826292a8e682,

title = "Quantifying height of machined steps on copper disk using Fourier domain short coherence interferometer",

keywords = "Compact linear collider, copper, step height, calibration, Fourier domain, short coherence, interferometry, SWEPT SOURCE OCT, ANTERIOR SEGMENT, TOMOGRAPHY, LASERS, EYE, 114 Physical sciences",

author = "Risto Montonen and Ivan Kassamakov and Edward Haeggstrom and Kenneth Osterberg",

note = " Volume: 9525 ; Spie optical metrology / optical measurement systems for industrial inspection ; Conference date: 22-06-2015 Through 25-06-2015",

year = "2015",

doi = "10.1117/12.2184715",

language = "English",

volume = "9525",

journal = "Proceedings of SPIE, the International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Quantifying height of machined steps on copper disk using Fourier domain short coherence interferometer

AU - Montonen, Risto

AU - Kassamakov, Ivan

AU - Haeggstrom, Edward

AU - Osterberg, Kenneth

N1 - Conference code: IX

PY - 2015

Y1 - 2015

KW - Compact linear collider

KW - copper

KW - step height

KW - calibration

KW - Fourier domain

KW - short coherence

KW - interferometry

KW - SWEPT SOURCE OCT

KW - ANTERIOR SEGMENT

KW - TOMOGRAPHY

KW - LASERS

KW - EYE

KW - 114 Physical sciences

U2 - 10.1117/12.2184715

DO - 10.1117/12.2184715

M3 - Conference article

SN - 0277-786X

VL - 9525

JO - Proceedings of SPIE, the International Society for Optical Engineering

JF - Proceedings of SPIE, the International Society for Optical Engineering

T2 - Spie optical metrology / optical measurement systems for industrial inspection

Y2 - 22 June 2015 through 25 June 2015

ER -