RADIATION ENHANCED OUTDIFFUSION DURING ION-IMPLANTATION

A ANTTILA, M HAUTALA

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    JournalApplied physics. A, Materials science & processing
    Volume19
    Pages (from-to)199-203
    Number of pages5
    ISSN0947-8396
    DOIs
    Publication statusPublished - 1979
    MoE publication typeA1 Journal article-refereed

    Fields of Science

    • 114 Physical sciences
    • 117 Geography, Environmental sciences

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