Reaction Mechanism Studies on ZrO2 Grown by ALD - A Comparison Between ZrCl4 and Cp2ZrMe2 Based Processes

A Rahtu, Jaakko Niinistö, Matti Putkonen, Lauri Niinistö, Mikko Ritala, Markku Leskelä

Research output: Book/Report › Commissioned report

Original language	English

Publication status	Published - 2004
Externally published	Yes
MoE publication type	D4 Published development or research report or study

HelsinkiALD
Putkonen, M. (Manager), Ritala, M. (Manager), Mäntymäki, M. (Operator), Kemell, M. (Operator), Vehkamäki, M. (Operator) & Heikkilä, M. (Operator)
Department of Chemistry
Facility/equipment: Research Laboratory

Cite this

TY - BOOK

T1 - Reaction Mechanism Studies on ZrO2 Grown by ALD - A Comparison Between ZrCl4 and Cp2ZrMe2 Based Processes

AU - Rahtu, A

AU - Niinistö, Jaakko

AU - Putkonen, Matti

AU - Niinistö, Lauri

AU - Ritala, Mikko

AU - Leskelä, Markku

PY - 2004

Y1 - 2004

M3 - Commissioned report

BT - Reaction Mechanism Studies on ZrO2 Grown by ALD - A Comparison Between ZrCl4 and Cp2ZrMe2 Based Processes

ER -