Rhenium Metal and Rhenium Nitride Thin Films Grown by Atomic Layer Deposition

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
JournalAngewandte Chemie (International Edition)
Volume57
Issue number44
Pages (from-to)14538-14542
Number of pages5
ISSN1433-7851
DOIs
Publication statusPublished - 26 Oct 2018
MoE publication typeA1 Journal article-refereed

Fields of Science

  • atomic layer deposition (ALD)
  • rhenium
  • rhenium nitrides
  • thin films
  • AMMONIA-SYNTHESIS
  • CATALYSTS
  • 114 Physical sciences

Cite this

@article{db722ec11949433c98c6d802c33c349b,
title = "Rhenium Metal and Rhenium Nitride Thin Films Grown by Atomic Layer Deposition",
keywords = "atomic layer deposition (ALD), rhenium, rhenium nitrides, thin films, AMMONIA-SYNTHESIS, CATALYSTS, 114 Physical sciences",
author = "Jani H{\"a}m{\"a}l{\"a}inen and Kenichiro Mizohata and Kristoffer Meinander and Miika Mattinen and Marko Vehkam{\"a}ki and Jyrki R{\"a}is{\"a}nen and Mikko Ritala and Markku Leskel{\"a}",
year = "2018",
month = "10",
day = "26",
doi = "10.1002/anie.201806985",
language = "English",
volume = "57",
pages = "14538--14542",
journal = "Angewandte Chemie (International Edition)",
issn = "1433-7851",
publisher = "Wiley-VCH",
number = "44",

}

Rhenium Metal and Rhenium Nitride Thin Films Grown by Atomic Layer Deposition. / Hämäläinen, Jani; Mizohata, Kenichiro; Meinander, Kristoffer; Mattinen, Miika; Vehkamäki, Marko; Räisänen, Jyrki; Ritala, Mikko; Leskelä, Markku.

In: Angewandte Chemie (International Edition), Vol. 57, No. 44, 26.10.2018, p. 14538-14542.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Rhenium Metal and Rhenium Nitride Thin Films Grown by Atomic Layer Deposition

AU - Hämäläinen, Jani

AU - Mizohata, Kenichiro

AU - Meinander, Kristoffer

AU - Mattinen, Miika

AU - Vehkamäki, Marko

AU - Räisänen, Jyrki

AU - Ritala, Mikko

AU - Leskelä, Markku

PY - 2018/10/26

Y1 - 2018/10/26

KW - atomic layer deposition (ALD)

KW - rhenium

KW - rhenium nitrides

KW - thin films

KW - AMMONIA-SYNTHESIS

KW - CATALYSTS

KW - 114 Physical sciences

U2 - 10.1002/anie.201806985

DO - 10.1002/anie.201806985

M3 - Article

VL - 57

SP - 14538

EP - 14542

JO - Angewandte Chemie (International Edition)

JF - Angewandte Chemie (International Edition)

SN - 1433-7851

IS - 44

ER -