SIMS- and NRA-measurements of depth profiles of implanted ions

J Likonen, Mikko Hautala

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the VIII International Conference on SIMS
    Publication date1992
    Pages415-418
    Publication statusPublished - 1992
    MoE publication typeA4 Article in conference proceedings

    Fields of Science

    • 114 Physical sciences
    • 117 Geography, Environmental sciences

    Cite this

    Likonen, J., & Hautala, M. (1992). SIMS- and NRA-measurements of depth profiles of implanted ions. In Proceedings of the VIII International Conference on SIMS (pp. 415-418)