Simulation of Ion Beam Mixing in Si/SiO2/Si Pillars with Accelerated Molecular Dynamics

Christoffer Fridlund, Kai Nordlund, Flyura Djurabekova

Research output: Conference materialsAbstract

Original languageEnglish
Publication statusPublished - 26 Jun 2017
EventNanoscale pattern formation at surfaces and Formation of 3D nanostructures - University of Helsinki, Helsinki, Finland
Duration: 26 Jun 201730 Jun 2017
http://beam.acclab.helsinki.fi/nano2017/nanopatterning2017/

Workshop

WorkshopNanoscale pattern formation at surfaces and Formation of 3D nanostructures
Abbreviated titleNanopatterning2017-FOR3NANO
Country/TerritoryFinland
CityHelsinki
Period26/06/201730/06/2017
Internet address

Fields of Science

  • 114 Physical sciences

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