Simulations of ion-beam induced atom-mixing over Si/SiO2 interfaces for preparation of concentration profiles

Research output: Conference materialsPosterResearch

Original languageEnglish
Publication statusPublished - 24 Mar 2017
EventPhysics Days 2017 - Helsinki, Finland
Duration: 22 Mar 201724 Mar 2017

Conference

ConferencePhysics Days 2017
CountryFinland
CityHelsinki
Period22/03/201724/03/2017

Fields of Science

  • 114 Physical sciences

Cite this

@conference{bcea05e46eae4c689fb02a04b8981e2d,
title = "Simulations of ion-beam induced atom-mixing over Si/SiO2 interfaces for preparation of concentration profiles",
keywords = "114 Physical sciences",
author = "Christoffer Fridlund and Kai Nordlund and Flyura Djurabekova",
year = "2017",
month = "3",
day = "24",
language = "English",
note = "Physics Days 2017 ; Conference date: 22-03-2017 Through 24-03-2017",

}

Simulations of ion-beam induced atom-mixing over Si/SiO2 interfaces for preparation of concentration profiles. / Fridlund, Christoffer; Nordlund, Kai; Djurabekova, Flyura.

2017. Poster session presented at Physics Days 2017, Helsinki, Finland.

Research output: Conference materialsPosterResearch

TY - CONF

T1 - Simulations of ion-beam induced atom-mixing over Si/SiO2 interfaces for preparation of concentration profiles

AU - Fridlund, Christoffer

AU - Nordlund, Kai

AU - Djurabekova, Flyura

PY - 2017/3/24

Y1 - 2017/3/24

KW - 114 Physical sciences

M3 - Poster

ER -