@article{d327c8e89fcd4fd48d375edf36d4a0ad,
title = "Step height standards based on self-assembly for 3D metrology of biological samples",
keywords = "nanometrology, transfer standard, calibration, CSI, SWLI, AFM, traceability, CALIBRATION, 221 Nano-technology",
author = "Ville Heikkinen and I. Kassamakov and T. Viitala and M. J{\"a}rvinen and T. Vainikka and A. Nolvi and C. Bermudez and R. Artigas and P. Martinez and Raija Korpelainen and A. Lassila and E. Haeggstr{\"o}m",
year = "2020",
month = sep,
doi = "10.1088/1361-6501/ab8c6a",
language = "English",
volume = "31",
journal = "Measurement Science and Technology",
issn = "0957-0233",
publisher = "IOP Publishing",
number = "9",
}