Studies on Li3AlF6 thin film deposition utilizing conversion reactions of thin films

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
JournalThin Solid Films
Volume636
Pages (from-to)26-33
Number of pages8
ISSN0040-6090
DOIs
Publication statusPublished - 2017
MoE publication typeA1 Journal article-refereed

Fields of Science

  • 114 Physical sciences
  • 116 Chemical sciences

Cite this

@article{5b143f6bad304740b2464d291ff7fc8b,
title = "Studies on Li3AlF6 thin film deposition utilizing conversion reactions of thin films",
keywords = "114 Physical sciences, 116 Chemical sciences",
author = "M{\"a}ntym{\"a}ki, {Miia Johanna} and Kenichiro Mizohata and Heikkil{\"a}, {Mikko Juhani} and R{\"a}is{\"a}nen, {Jyrki Antero} and Ritala, {Mikko Kalervo} and Leskel{\"a}, {Markku Antero}",
year = "2017",
doi = "10.1016/j.tsf.2017.05.026",
language = "English",
volume = "636",
pages = "26--33",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",

}

TY - JOUR

T1 - Studies on Li3AlF6 thin film deposition utilizing conversion reactions of thin films

AU - Mäntymäki, Miia Johanna

AU - Mizohata, Kenichiro

AU - Heikkilä, Mikko Juhani

AU - Räisänen, Jyrki Antero

AU - Ritala, Mikko Kalervo

AU - Leskelä, Markku Antero

PY - 2017

Y1 - 2017

KW - 114 Physical sciences

KW - 116 Chemical sciences

U2 - 10.1016/j.tsf.2017.05.026

DO - 10.1016/j.tsf.2017.05.026

M3 - Article

VL - 636

SP - 26

EP - 33

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

ER -