Studies on solid state reactions of atomic layer deposited thin films of lithium carbonate with hafnia and zirconia

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Article number020929
JournalJournal of vacuum science & technology : an official journal of the American Vacuum Society
Volume37
Issue number2
Number of pages8
ISSN0734-2101
DOIs
Publication statusPublished - Mar 2019
MoE publication typeA1 Journal article-refereed

Fields of Science

  • CATHODE
  • 114 Physical sciences
  • 116 Chemical sciences

Cite this

@article{28a6684c4862430badde5500b3985dde,
title = "Studies on solid state reactions of atomic layer deposited thin films of lithium carbonate with hafnia and zirconia",
keywords = "CATHODE, 114 Physical sciences, 116 Chemical sciences",
author = "Miia M{\"a}ntym{\"a}ki and Elisa Atosuo and Heikkil{\"a}, {Mikko J.} and Marko Vehkam{\"a}ki and Miika Mattinen and Kenichiro Mizohata and Jyrki R{\"a}is{\"a}nen and Mikko Ritala and Markku Leskel{\"a}",
year = "2019",
month = "3",
doi = "10.1116/1.5081494",
language = "English",
volume = "37",
journal = "Journal of vacuum science & technology : an official journal of the American Vacuum Society",
issn = "0734-2101",
publisher = "AVS",
number = "2",

}

TY - JOUR

T1 - Studies on solid state reactions of atomic layer deposited thin films of lithium carbonate with hafnia and zirconia

AU - Mäntymäki, Miia

AU - Atosuo, Elisa

AU - Heikkilä, Mikko J.

AU - Vehkamäki, Marko

AU - Mattinen, Miika

AU - Mizohata, Kenichiro

AU - Räisänen, Jyrki

AU - Ritala, Mikko

AU - Leskelä, Markku

PY - 2019/3

Y1 - 2019/3

KW - CATHODE

KW - 114 Physical sciences

KW - 116 Chemical sciences

U2 - 10.1116/1.5081494

DO - 10.1116/1.5081494

M3 - Article

VL - 37

JO - Journal of vacuum science & technology : an official journal of the American Vacuum Society

JF - Journal of vacuum science & technology : an official journal of the American Vacuum Society

SN - 0734-2101

IS - 2

M1 - 020929

ER -