@article{28a6684c4862430badde5500b3985dde,
title = "Studies on solid state reactions of atomic layer deposited thin films of lithium carbonate with hafnia and zirconia",
keywords = "CATHODE, 114 Physical sciences, 116 Chemical sciences",
author = "Miia M{\"a}ntym{\"a}ki and Elisa Atosuo and Heikkil{\"a}, {Mikko J.} and Marko Vehkam{\"a}ki and Miika Mattinen and Kenichiro Mizohata and Jyrki R{\"a}is{\"a}nen and Mikko Ritala and Markku Leskel{\"a}",
year = "2019",
month = mar,
doi = "10.1116/1.5081494",
language = "English",
volume = "37",
journal = "Journal of vacuum science & technology : an official journal of the American Vacuum Society",
issn = "0734-2101",
publisher = "AVS",
number = "2",
}