Studies on Thermal Atomic Layer Deposition of Silver Thin Films

Maarit Mäkelä, Timo Hatanpää, Kenichiro Mizohata, Kristoffer Meinander, Jaakko Niinistö, Jyrki Räisänen, Mikko Ritala, Markku Leskelä

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
JournalChemistry of Materials
Volume29
Issue number5
Pages (from-to)2040-2045
Number of pages6
ISSN0897-4756
DOIs
Publication statusPublished - 14 Mar 2017
MoE publication typeA1 Journal article-refereed

Fields of Science

  • CHEMICAL-VAPOR-DEPOSITION
  • 116 Chemical sciences
  • 114 Physical sciences

Cite this

@article{a8584bff2ef7407fbe27c011ad151cef,
title = "Studies on Thermal Atomic Layer Deposition of Silver Thin Films",
keywords = "CHEMICAL-VAPOR-DEPOSITION, 116 Chemical sciences, 114 Physical sciences",
author = "Maarit M{\"a}kel{\"a} and Timo Hatanp{\"a}{\"a} and Kenichiro Mizohata and Kristoffer Meinander and Jaakko Niinist{\"o} and Jyrki R{\"a}is{\"a}nen and Mikko Ritala and Markku Leskel{\"a}",
year = "2017",
month = "3",
day = "14",
doi = "10.1021/acs.chemmater.6b04029",
language = "English",
volume = "29",
pages = "2040--2045",
journal = "Chemistry of Materials",
issn = "0897-4756",
publisher = "American Chemical Society",
number = "5",

}

Studies on Thermal Atomic Layer Deposition of Silver Thin Films. / Mäkelä, Maarit; Hatanpää, Timo; Mizohata, Kenichiro; Meinander, Kristoffer; Niinistö, Jaakko; Räisänen, Jyrki; Ritala, Mikko; Leskelä, Markku.

In: Chemistry of Materials, Vol. 29, No. 5, 14.03.2017, p. 2040-2045.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Studies on Thermal Atomic Layer Deposition of Silver Thin Films

AU - Mäkelä, Maarit

AU - Hatanpää, Timo

AU - Mizohata, Kenichiro

AU - Meinander, Kristoffer

AU - Niinistö, Jaakko

AU - Räisänen, Jyrki

AU - Ritala, Mikko

AU - Leskelä, Markku

PY - 2017/3/14

Y1 - 2017/3/14

KW - CHEMICAL-VAPOR-DEPOSITION

KW - 116 Chemical sciences

KW - 114 Physical sciences

U2 - 10.1021/acs.chemmater.6b04029

DO - 10.1021/acs.chemmater.6b04029

M3 - Article

VL - 29

SP - 2040

EP - 2045

JO - Chemistry of Materials

JF - Chemistry of Materials

SN - 0897-4756

IS - 5

ER -