Study of Atomic Layer Deposited Zirconium Oxide Thin Films by Using Mono-Cyclopentadienyl Based Precursors

H. Castán, S. Dueñas, H. García, A. Gómez, L. Bailón, K. Kukli, J. Niinistö, M. Ritala, M. Leskelä

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the 2009 Spanish Conference on Electron Devices
    Number of pages4
    PublisherIEEE
    Publication date2009
    Pages8-11
    ISBN (Print)978-1-4244-2839-7
    DOIs
    Publication statusPublished - 2009
    MoE publication typeA4 Article in conference proceedings
    EventSpanish Conference on Electron Devices - Santiago de Compostela, Spain
    Duration: 11 Feb 200913 Feb 2009
    Conference number: CDE 2009

    Fields of Science

    • 116 Chemical sciences

    Cite this

    Castán, H., Dueñas, S., García, H., Gómez, A., Bailón, L., Kukli, K., ... Leskelä, M. (2009). Study of Atomic Layer Deposited Zirconium Oxide Thin Films by Using Mono-Cyclopentadienyl Based Precursors. In Proceedings of the 2009 Spanish Conference on Electron Devices (pp. 8-11). IEEE. https://doi.org/10.1109/SCED.2009.4800416
    Castán, H. ; Dueñas, S. ; García, H. ; Gómez, A. ; Bailón, L. ; Kukli, K. ; Niinistö, J. ; Ritala, M. ; Leskelä, M. / Study of Atomic Layer Deposited Zirconium Oxide Thin Films by Using Mono-Cyclopentadienyl Based Precursors. Proceedings of the 2009 Spanish Conference on Electron Devices. IEEE, 2009. pp. 8-11
    @inproceedings{ded0ebe959c34117aa3766cac11c2c3d,
    title = "Study of Atomic Layer Deposited Zirconium Oxide Thin Films by Using Mono-Cyclopentadienyl Based Precursors",
    keywords = "116 Chemical sciences",
    author = "H. Cast{\'a}n and S. Due{\~n}as and H. Garc{\'i}a and A. G{\'o}mez and L. Bail{\'o}n and K. Kukli and J. Niinist{\"o} and M. Ritala and M. Leskel{\"a}",
    note = "Volume: Proceeding volume:",
    year = "2009",
    doi = "10.1109/SCED.2009.4800416",
    language = "English",
    isbn = "978-1-4244-2839-7",
    pages = "8--11",
    booktitle = "Proceedings of the 2009 Spanish Conference on Electron Devices",
    publisher = "IEEE",
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    }

    Castán, H, Dueñas, S, García, H, Gómez, A, Bailón, L, Kukli, K, Niinistö, J, Ritala, M & Leskelä, M 2009, Study of Atomic Layer Deposited Zirconium Oxide Thin Films by Using Mono-Cyclopentadienyl Based Precursors. in Proceedings of the 2009 Spanish Conference on Electron Devices. IEEE, pp. 8-11, Spanish Conference on Electron Devices, Santiago de Compostela, Spain, 11/02/2009. https://doi.org/10.1109/SCED.2009.4800416

    Study of Atomic Layer Deposited Zirconium Oxide Thin Films by Using Mono-Cyclopentadienyl Based Precursors. / Castán, H.; Dueñas, S.; García, H.; Gómez, A.; Bailón, L.; Kukli, K.; Niinistö, J.; Ritala, M.; Leskelä, M.

    Proceedings of the 2009 Spanish Conference on Electron Devices. IEEE, 2009. p. 8-11.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    TY - GEN

    T1 - Study of Atomic Layer Deposited Zirconium Oxide Thin Films by Using Mono-Cyclopentadienyl Based Precursors

    AU - Castán, H.

    AU - Dueñas, S.

    AU - García, H.

    AU - Gómez, A.

    AU - Bailón, L.

    AU - Kukli, K.

    AU - Niinistö, J.

    AU - Ritala, M.

    AU - Leskelä, M.

    N1 - Volume: Proceeding volume:

    PY - 2009

    Y1 - 2009

    KW - 116 Chemical sciences

    U2 - 10.1109/SCED.2009.4800416

    DO - 10.1109/SCED.2009.4800416

    M3 - Conference contribution

    SN - 978-1-4244-2839-7

    SP - 8

    EP - 11

    BT - Proceedings of the 2009 Spanish Conference on Electron Devices

    PB - IEEE

    ER -

    Castán H, Dueñas S, García H, Gómez A, Bailón L, Kukli K et al. Study of Atomic Layer Deposited Zirconium Oxide Thin Films by Using Mono-Cyclopentadienyl Based Precursors. In Proceedings of the 2009 Spanish Conference on Electron Devices. IEEE. 2009. p. 8-11 https://doi.org/10.1109/SCED.2009.4800416