Toward epitaxial ternary oxide multilayer device stacks by atomic layer deposition

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Article number020602
JournalJournal of vacuum science & technology : an official journal of the American Vacuum Society
Volume37
Issue number2
Number of pages4
ISSN0734-2101
DOIs
Publication statusPublished - Mar 2019
MoE publication typeA1 Journal article-refereed

Fields of Science

  • LANIO3 THIN-FILMS
  • GROWTH
  • SRTIO3
  • 114 Physical sciences
  • 221 Nano-technology

Cite this

@article{c913cb2dfe54446cade74d8754421dcd,
title = "Toward epitaxial ternary oxide multilayer device stacks by atomic layer deposition",
keywords = "LANIO3 THIN-FILMS, GROWTH, SRTIO3, 114 Physical sciences, 221 Nano-technology",
author = "King, {Peter J.} and Marko Vehkam{\"a}ki and Miika Mattinen and Heikkil{\"a}, {Mikko J.} and Kenichiro Mizohata and Wontae Noh and Markku Leskel{\"a} and Mikko Ritala",
year = "2019",
month = "3",
doi = "10.1116/1.5081997",
language = "English",
volume = "37",
journal = "Journal of vacuum science & technology : an official journal of the American Vacuum Society",
issn = "0734-2101",
publisher = "AVS",
number = "2",

}

TY - JOUR

T1 - Toward epitaxial ternary oxide multilayer device stacks by atomic layer deposition

AU - King, Peter J.

AU - Vehkamäki, Marko

AU - Mattinen, Miika

AU - Heikkilä, Mikko J.

AU - Mizohata, Kenichiro

AU - Noh, Wontae

AU - Leskelä, Markku

AU - Ritala, Mikko

PY - 2019/3

Y1 - 2019/3

KW - LANIO3 THIN-FILMS

KW - GROWTH

KW - SRTIO3

KW - 114 Physical sciences

KW - 221 Nano-technology

U2 - 10.1116/1.5081997

DO - 10.1116/1.5081997

M3 - Article

VL - 37

JO - Journal of vacuum science & technology : an official journal of the American Vacuum Society

JF - Journal of vacuum science & technology : an official journal of the American Vacuum Society

SN - 0734-2101

IS - 2

M1 - 020602

ER -