Vapor-Phase Self-Assembled Monolayers for Improved MEMS Reliability

Anna Rissanen, Kirsi Tuppura, Mari Laamanen, Riikka Puurunen, Elina Färm, Mikko Ritala, Markku Leskelä

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationIEEE SENSORS 2010 Conference
Number of pages4
Publication date2010
Pages767-700
DOIs
Publication statusPublished - 2010
MoE publication typeA4 Article in conference proceedings

Fields of Science

  • 116 Chemical sciences

Cite this

Rissanen, A., Tuppura, K., Laamanen, M., Puurunen, R., Färm, E., Ritala, M., & Leskelä, M. (2010). Vapor-Phase Self-Assembled Monolayers for Improved MEMS Reliability. In IEEE SENSORS 2010 Conference (pp. 767-700) https://doi.org/10.1109/ICSENS.2010.5690769
Rissanen, Anna ; Tuppura, Kirsi ; Laamanen, Mari ; Puurunen, Riikka ; Färm, Elina ; Ritala, Mikko ; Leskelä, Markku. / Vapor-Phase Self-Assembled Monolayers for Improved MEMS Reliability. IEEE SENSORS 2010 Conference. 2010. pp. 767-700
@inproceedings{8134cb3db4b94edaa6abbabe39a06afd,
title = "Vapor-Phase Self-Assembled Monolayers for Improved MEMS Reliability",
keywords = "116 Chemical sciences",
author = "Anna Rissanen and Kirsi Tuppura and Mari Laamanen and Riikka Puurunen and Elina F{\"a}rm and Mikko Ritala and Markku Leskel{\"a}",
note = "Volume: Proceeding volume:",
year = "2010",
doi = "10.1109/ICSENS.2010.5690769",
language = "English",
pages = "767--700",
booktitle = "IEEE SENSORS 2010 Conference",

}

Rissanen, A, Tuppura, K, Laamanen, M, Puurunen, R, Färm, E, Ritala, M & Leskelä, M 2010, Vapor-Phase Self-Assembled Monolayers for Improved MEMS Reliability. in IEEE SENSORS 2010 Conference. pp. 767-700. https://doi.org/10.1109/ICSENS.2010.5690769

Vapor-Phase Self-Assembled Monolayers for Improved MEMS Reliability. / Rissanen, Anna; Tuppura, Kirsi; Laamanen, Mari; Puurunen, Riikka; Färm, Elina; Ritala, Mikko; Leskelä, Markku.

IEEE SENSORS 2010 Conference. 2010. p. 767-700.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

TY - GEN

T1 - Vapor-Phase Self-Assembled Monolayers for Improved MEMS Reliability

AU - Rissanen, Anna

AU - Tuppura, Kirsi

AU - Laamanen, Mari

AU - Puurunen, Riikka

AU - Färm, Elina

AU - Ritala, Mikko

AU - Leskelä, Markku

N1 - Volume: Proceeding volume:

PY - 2010

Y1 - 2010

KW - 116 Chemical sciences

U2 - 10.1109/ICSENS.2010.5690769

DO - 10.1109/ICSENS.2010.5690769

M3 - Conference contribution

SP - 767

EP - 700

BT - IEEE SENSORS 2010 Conference

ER -

Rissanen A, Tuppura K, Laamanen M, Puurunen R, Färm E, Ritala M et al. Vapor-Phase Self-Assembled Monolayers for Improved MEMS Reliability. In IEEE SENSORS 2010 Conference. 2010. p. 767-700 https://doi.org/10.1109/ICSENS.2010.5690769