3D IMAGING INSIDE DISCHARGING MICROFLUIDIC CHANNEL USING SCANNING WHITE LIGHT INTERFEROMETRY

Tutkimustuotos: Artikkeli kirjassa/raportissa/konferenssijulkaisussaKonferenssiartikkeliTieteellinen

Kuvaus

Scanning White Light Interferometry (SWLI) permits rapid accurate nondestructive testing.
It inspects tall multilayer structures few mm2 by area with nm height resolution.
Such structures are found e.g. in microelectronics and microfluidics. Structures covered
by a relatively thick (even mm) covering layer can be measured through the layer by using
compensating plate in the reference arm of the interferometer.
We apply this multilayer imaging capability to characterize the internal structure of a 50
μm tall discharging microfluidic channel. We first measured the empty channel, then the
water-filled (static) channel, and finally the discharging channel. The measured dimensions
were similar in all measurements when the refractive index of water was taken into
account.
The results confirm that SWLI can be used to image structures inside a discharging
microfluidic channel. This could be used e.g. to test how a drug dissolves in different
microenvironments.
Alkuperäiskielienglanti
OtsikkoPhysics Days : The 46th annual meeting of the Finnish Physical Society, proceedings
Sivumäärä1
JulkaisupaikkaJoensuu
Julkaisupäivä2012
Sivut112
TilaJulkaistu - 2012
OKM-julkaisutyyppiB3 Vertaisarvioimaton artikkeli konferenssijulkaisussa
TapahtumaPhysics Days - Joensuu, Suomi
Kesto: 13 maaliskuuta 201215 maaliskuuta 2012
Konferenssinumero: 46

Lisätietoja


Volume:
Proceeding volume:

Tieteenalat

  • 114 Fysiikka

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Heikkinen, V., Ylitalo, T. J., Nolvi, A., Hanhijärvi, K., Aaltonen, J. P., Kassamakov, I. V., & Haeggström, E. (2012). 3D IMAGING INSIDE DISCHARGING MICROFLUIDIC CHANNEL USING SCANNING WHITE LIGHT INTERFEROMETRY. teoksessa Physics Days: The 46th annual meeting of the Finnish Physical Society, proceedings (Sivut 112). Joensuu.
Heikkinen, Ville ; Ylitalo, Tuomo Johannes ; Nolvi, Anton ; Hanhijärvi, Kalle ; Aaltonen, Juha Pekka ; Kassamakov, Ivan Vladislavov ; Haeggström, Edward. / 3D IMAGING INSIDE DISCHARGING MICROFLUIDIC CHANNEL USING SCANNING WHITE LIGHT INTERFEROMETRY. Physics Days: The 46th annual meeting of the Finnish Physical Society, proceedings. Joensuu, 2012. Sivut 112
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title = "3D IMAGING INSIDE DISCHARGING MICROFLUIDIC CHANNEL USING SCANNING WHITE LIGHT INTERFEROMETRY",
abstract = "Scanning White Light Interferometry (SWLI) permits rapid accurate nondestructive testing.It inspects tall multilayer structures few mm2 by area with nm height resolution.Such structures are found e.g. in microelectronics and microfluidics. Structures coveredby a relatively thick (even mm) covering layer can be measured through the layer by usingcompensating plate in the reference arm of the interferometer.We apply this multilayer imaging capability to characterize the internal structure of a 50μm tall discharging microfluidic channel. We first measured the empty channel, then thewater-filled (static) channel, and finally the discharging channel. The measured dimensionswere similar in all measurements when the refractive index of water was taken intoaccount.The results confirm that SWLI can be used to image structures inside a dischargingmicrofluidic channel. This could be used e.g. to test how a drug dissolves in differentmicroenvironments.",
keywords = "114 Physical sciences",
author = "Ville Heikkinen and Ylitalo, {Tuomo Johannes} and Anton Nolvi and Kalle Hanhij{\"a}rvi and Aaltonen, {Juha Pekka} and Kassamakov, {Ivan Vladislavov} and Edward Haeggstr{\"o}m",
note = "Volume: Proceeding volume:",
year = "2012",
language = "English",
pages = "112",
booktitle = "Physics Days",

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Heikkinen, V, Ylitalo, TJ, Nolvi, A, Hanhijärvi, K, Aaltonen, JP, Kassamakov, IV & Haeggström, E 2012, 3D IMAGING INSIDE DISCHARGING MICROFLUIDIC CHANNEL USING SCANNING WHITE LIGHT INTERFEROMETRY. julkaisussa Physics Days: The 46th annual meeting of the Finnish Physical Society, proceedings. Joensuu, Sivut 112, Physics Days, Joensuu, Suomi, 13/03/2012.

3D IMAGING INSIDE DISCHARGING MICROFLUIDIC CHANNEL USING SCANNING WHITE LIGHT INTERFEROMETRY. / Heikkinen, Ville; Ylitalo, Tuomo Johannes; Nolvi, Anton; Hanhijärvi, Kalle; Aaltonen, Juha Pekka; Kassamakov, Ivan Vladislavov; Haeggström, Edward.

Physics Days: The 46th annual meeting of the Finnish Physical Society, proceedings. Joensuu, 2012. s. 112.

Tutkimustuotos: Artikkeli kirjassa/raportissa/konferenssijulkaisussaKonferenssiartikkeliTieteellinen

TY - GEN

T1 - 3D IMAGING INSIDE DISCHARGING MICROFLUIDIC CHANNEL USING SCANNING WHITE LIGHT INTERFEROMETRY

AU - Heikkinen, Ville

AU - Ylitalo, Tuomo Johannes

AU - Nolvi, Anton

AU - Hanhijärvi, Kalle

AU - Aaltonen, Juha Pekka

AU - Kassamakov, Ivan Vladislavov

AU - Haeggström, Edward

N1 - Volume: Proceeding volume:

PY - 2012

Y1 - 2012

N2 - Scanning White Light Interferometry (SWLI) permits rapid accurate nondestructive testing.It inspects tall multilayer structures few mm2 by area with nm height resolution.Such structures are found e.g. in microelectronics and microfluidics. Structures coveredby a relatively thick (even mm) covering layer can be measured through the layer by usingcompensating plate in the reference arm of the interferometer.We apply this multilayer imaging capability to characterize the internal structure of a 50μm tall discharging microfluidic channel. We first measured the empty channel, then thewater-filled (static) channel, and finally the discharging channel. The measured dimensionswere similar in all measurements when the refractive index of water was taken intoaccount.The results confirm that SWLI can be used to image structures inside a dischargingmicrofluidic channel. This could be used e.g. to test how a drug dissolves in differentmicroenvironments.

AB - Scanning White Light Interferometry (SWLI) permits rapid accurate nondestructive testing.It inspects tall multilayer structures few mm2 by area with nm height resolution.Such structures are found e.g. in microelectronics and microfluidics. Structures coveredby a relatively thick (even mm) covering layer can be measured through the layer by usingcompensating plate in the reference arm of the interferometer.We apply this multilayer imaging capability to characterize the internal structure of a 50μm tall discharging microfluidic channel. We first measured the empty channel, then thewater-filled (static) channel, and finally the discharging channel. The measured dimensionswere similar in all measurements when the refractive index of water was taken intoaccount.The results confirm that SWLI can be used to image structures inside a dischargingmicrofluidic channel. This could be used e.g. to test how a drug dissolves in differentmicroenvironments.

KW - 114 Physical sciences

M3 - Conference contribution

SP - 112

BT - Physics Days

CY - Joensuu

ER -

Heikkinen V, Ylitalo TJ, Nolvi A, Hanhijärvi K, Aaltonen JP, Kassamakov IV et al. 3D IMAGING INSIDE DISCHARGING MICROFLUIDIC CHANNEL USING SCANNING WHITE LIGHT INTERFEROMETRY. julkaisussa Physics Days: The 46th annual meeting of the Finnish Physical Society, proceedings. Joensuu. 2012. s. 112