Kuvaus
It inspects tall multilayer structures few mm2 by area with nm height resolution.
Such structures are found e.g. in microelectronics and microfluidics. Structures covered
by a relatively thick (even mm) covering layer can be measured through the layer by using
compensating plate in the reference arm of the interferometer.
We apply this multilayer imaging capability to characterize the internal structure of a 50
μm tall discharging microfluidic channel. We first measured the empty channel, then the
water-filled (static) channel, and finally the discharging channel. The measured dimensions
were similar in all measurements when the refractive index of water was taken into
account.
The results confirm that SWLI can be used to image structures inside a discharging
microfluidic channel. This could be used e.g. to test how a drug dissolves in different
microenvironments.
| Alkuperäiskieli | englanti |
|---|---|
| Otsikko | Physics Days : The 46th annual meeting of the Finnish Physical Society, proceedings |
| Sivumäärä | 1 |
| Julkaisupaikka | Joensuu |
| Julkaisupäivä | 2012 |
| Sivut | 112 |
| Tila | Julkaistu - 2012 |
| OKM-julkaisutyyppi | B3 Vertaisarvioimaton artikkeli konferenssijulkaisussa |
| Tapahtuma | Physics Days - Joensuu, Suomi Kesto: 13 maaliskuuta 2012 → 15 maaliskuuta 2012 Konferenssinumero: 46 |
Lisätietoja
Volume:
Proceeding volume:
Tieteenalat
- 114 Fysiikka
Lainaa tätä
}
3D IMAGING INSIDE DISCHARGING MICROFLUIDIC CHANNEL USING SCANNING WHITE LIGHT INTERFEROMETRY. / Heikkinen, Ville; Ylitalo, Tuomo Johannes; Nolvi, Anton; Hanhijärvi, Kalle; Aaltonen, Juha Pekka; Kassamakov, Ivan Vladislavov; Haeggström, Edward.
Physics Days: The 46th annual meeting of the Finnish Physical Society, proceedings. Joensuu, 2012. s. 112.Tutkimustuotos: Artikkeli kirjassa/raportissa/konferenssijulkaisussa › Konferenssiartikkeli › Tieteellinen
TY - GEN
T1 - 3D IMAGING INSIDE DISCHARGING MICROFLUIDIC CHANNEL USING SCANNING WHITE LIGHT INTERFEROMETRY
AU - Heikkinen, Ville
AU - Ylitalo, Tuomo Johannes
AU - Nolvi, Anton
AU - Hanhijärvi, Kalle
AU - Aaltonen, Juha Pekka
AU - Kassamakov, Ivan Vladislavov
AU - Haeggström, Edward
N1 - Volume: Proceeding volume:
PY - 2012
Y1 - 2012
N2 - Scanning White Light Interferometry (SWLI) permits rapid accurate nondestructive testing.It inspects tall multilayer structures few mm2 by area with nm height resolution.Such structures are found e.g. in microelectronics and microfluidics. Structures coveredby a relatively thick (even mm) covering layer can be measured through the layer by usingcompensating plate in the reference arm of the interferometer.We apply this multilayer imaging capability to characterize the internal structure of a 50μm tall discharging microfluidic channel. We first measured the empty channel, then thewater-filled (static) channel, and finally the discharging channel. The measured dimensionswere similar in all measurements when the refractive index of water was taken intoaccount.The results confirm that SWLI can be used to image structures inside a dischargingmicrofluidic channel. This could be used e.g. to test how a drug dissolves in differentmicroenvironments.
AB - Scanning White Light Interferometry (SWLI) permits rapid accurate nondestructive testing.It inspects tall multilayer structures few mm2 by area with nm height resolution.Such structures are found e.g. in microelectronics and microfluidics. Structures coveredby a relatively thick (even mm) covering layer can be measured through the layer by usingcompensating plate in the reference arm of the interferometer.We apply this multilayer imaging capability to characterize the internal structure of a 50μm tall discharging microfluidic channel. We first measured the empty channel, then thewater-filled (static) channel, and finally the discharging channel. The measured dimensionswere similar in all measurements when the refractive index of water was taken intoaccount.The results confirm that SWLI can be used to image structures inside a dischargingmicrofluidic channel. This could be used e.g. to test how a drug dissolves in differentmicroenvironments.
KW - 114 Physical sciences
M3 - Conference contribution
SP - 112
BT - Physics Days
CY - Joensuu
ER -