3D IMAGING INSIDE DISCHARGING MICROFLUIDIC CHANNEL USING SCANNING WHITE LIGHT INTERFEROMETRY

Tutkimustuotos: Artikkeli kirjassa/raportissa/konferenssijulkaisussaKonferenssiartikkeliTieteellinen

Abstrakti

Scanning White Light Interferometry (SWLI) permits rapid accurate nondestructive testing.
It inspects tall multilayer structures few mm2 by area with nm height resolution.
Such structures are found e.g. in microelectronics and microfluidics. Structures covered
by a relatively thick (even mm) covering layer can be measured through the layer by using
compensating plate in the reference arm of the interferometer.
We apply this multilayer imaging capability to characterize the internal structure of a 50
μm tall discharging microfluidic channel. We first measured the empty channel, then the
water-filled (static) channel, and finally the discharging channel. The measured dimensions
were similar in all measurements when the refractive index of water was taken into
account.
The results confirm that SWLI can be used to image structures inside a discharging
microfluidic channel. This could be used e.g. to test how a drug dissolves in different
microenvironments.
Alkuperäiskielienglanti
OtsikkoPhysics Days : The 46th annual meeting of the Finnish Physical Society, proceedings
Sivumäärä1
JulkaisupaikkaJoensuu
Julkaisupäivä2012
Sivut112
TilaJulkaistu - 2012
OKM-julkaisutyyppiB3 Vertaisarvioimaton artikkeli konferenssijulkaisussa
TapahtumaPhysics Days - Joensuu, Suomi
Kesto: 13 maaliskuuta 201215 maaliskuuta 2012
Konferenssinumero: 46

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