Abstrakti
Scanning White Light Interferometry (SWLI) permits rapid accurate nondestructive testing.
It inspects tall multilayer structures few mm2 by area with nm height resolution.
Such structures are found e.g. in microelectronics and microfluidics. Structures covered
by a relatively thick (even mm) covering layer can be measured through the layer by using
compensating plate in the reference arm of the interferometer.
We apply this multilayer imaging capability to characterize the internal structure of a 50
μm tall discharging microfluidic channel. We first measured the empty channel, then the
water-filled (static) channel, and finally the discharging channel. The measured dimensions
were similar in all measurements when the refractive index of water was taken into
account.
The results confirm that SWLI can be used to image structures inside a discharging
microfluidic channel. This could be used e.g. to test how a drug dissolves in different
microenvironments.
It inspects tall multilayer structures few mm2 by area with nm height resolution.
Such structures are found e.g. in microelectronics and microfluidics. Structures covered
by a relatively thick (even mm) covering layer can be measured through the layer by using
compensating plate in the reference arm of the interferometer.
We apply this multilayer imaging capability to characterize the internal structure of a 50
μm tall discharging microfluidic channel. We first measured the empty channel, then the
water-filled (static) channel, and finally the discharging channel. The measured dimensions
were similar in all measurements when the refractive index of water was taken into
account.
The results confirm that SWLI can be used to image structures inside a discharging
microfluidic channel. This could be used e.g. to test how a drug dissolves in different
microenvironments.
| Alkuperäiskieli | englanti |
|---|---|
| Otsikko | Physics Days : The 46th annual meeting of the Finnish Physical Society, proceedings |
| Sivumäärä | 1 |
| Julkaisupaikka | Joensuu |
| Julkaisupäivä | 2012 |
| Sivut | 112 |
| Tila | Julkaistu - 2012 |
| OKM-julkaisutyyppi | B3 Vertaisarvioimaton artikkeli konferenssijulkaisussa |
| Tapahtuma | Physics Days - Joensuu, Suomi Kesto: 13 maaliskuuta 2012 → 15 maaliskuuta 2012 Konferenssinumero: 46 |
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