Argon cluster impacts on layered silicon, silica, and graphite surfaces

Juha Samela; Kai Nordlund; Juhani Keinonen; V. N Popok; E. E. B Campbell

doi:10.1140/epjd/e2007-00104-y

Argon cluster impacts on layered silicon, silica, and graphite surfaces

Juha Samela, Kai Nordlund, Juhani Keinonen, V. N Popok, E. E. B Campbell

Tutkimustuotos: Artikkelijulkaisu › Artikkeli › Tieteellinen › vertaisarvioitu

Abstrakti

Seven structures of covalently bonded materials are used as targets of 6 keV Ar-12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.

Alkuperäiskieli	englanti
Lehti	European Physical Journal D. Atomic, Molecular, Optical and Plasma Physics
Vuosikerta	43
Numero	1-3
Sivut	181-184
Sivumäärä	4
ISSN	1434-6060
DOI - pysyväislinkit	https://doi.org/10.1140/epjd/e2007-00104-y
Tila	Julkaistu - 2007
OKM-julkaisutyyppi	A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä, vertaisarvioitu

Pääsy asiakirjaan

10.1140/epjd/e2007-00104-y

Siteeraa tätä

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title = "Argon cluster impacts on layered silicon, silica, and graphite surfaces",

abstract = "Seven structures of covalently bonded materials are used as targets of 6 keV Ar-12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.",

author = "Juha Samela and Kai Nordlund and Juhani Keinonen and Popok, {V. N} and Campbell, {E. E. B}",

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AU - Samela, Juha

AU - Nordlund, Kai

AU - Keinonen, Juhani

AU - Popok, V. N

AU - Campbell, E. E. B

PY - 2007

Y1 - 2007

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AB - Seven structures of covalently bonded materials are used as targets of 6 keV Ar-12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.

U2 - 10.1140/epjd/e2007-00104-y

DO - 10.1140/epjd/e2007-00104-y

M3 - Article

VL - 43

SP - 181

EP - 184

JO - European Physical Journal D. Atomic, Molecular, Optical and Plasma Physics

JF - European Physical Journal D. Atomic, Molecular, Optical and Plasma Physics

SN - 1434-6060

IS - 1-3

ER -