Atomic Layer Deposited Hybrid Organic-Inorganic Aluminates as Potential Low-k Dielectric Materials

Karina B Klepper, Kimmo Ville Antero Miikkulainen, Ola Nilsen, Helmer Fjellvåg, Ming Liu, Dhanadeep Dutta, David Gidley, William Lanford, Liza Ross, Han Li, Sean W King

Tutkimustuotos: ArtikkelijulkaisuKonferenssiartikkeliTieteellinenvertaisarvioitu

Abstrakti

The material properties of atomic layer deposited hybrid organic-inorganic aluminate thin films have been evaluated for potential low dielectric constant (i.e. low-k) applications. The hybrid aluminates were deposited using trimethyl aluminum and various linear and aromatic carboxylic acids. The observed electrical and mechanical properties for the hybrid aluminate films varied greatly depending on the selected organic acid with k values ranging from 2.5 to 5.1 and Young’s modulus ranging from 6 to 40 GPa. Leakage currents as low as 4 x 10-10 A/cm2 (at 2 MV/cm) were obtained for films grown using saturated linear carboxylic acids. These results suggest the potential of ALD hybrid aluminate thin films for low-k dielectric applications.
Alkuperäiskielienglanti
LehtiMRS Proceedings
Vuosikerta1791
Sivut15-20
Sivumäärä6
ISSN0272-9172
DOI - pysyväislinkit
TilaJulkaistu - 1 toukok. 2015
OKM-julkaisutyyppiA4 Artikkeli konferenssijulkaisuussa
TapahtumaAVS Topical Conference on Atomic Layer Deposition - Portland, OR, Yhdysvallat (USA)
Kesto: 28 kesäk. 20151 heinäk. 2015
Konferenssinumero: 15

Lisätietoja


Volume: 1791

Tieteenalat

  • 221 Nanoteknologia
  • atomic layer deposition
  • dielectric
  • Elastic properties

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