@article{40b46fe0bdc24c699c2d3d1ea42d58a6,
title = "Atomic Layer Deposition and Performance of ZrO2-Al2O3 Thin Films",
keywords = "ROOM-TEMPERATURE FERROMAGNETISM, ZRO2 NANOSTRUCTURES, RRAM DEVICES, ENCAPSULATION, CAPACITORS, EPITAXY, ALUMINA, GROWTH, 221 Nano-technology, 116 Chemical sciences",
author = "Kaupo Kukli and Marianna Kemell and Helena Castan and Salvador Duenas and Helina Seemen and Mihkel R{\"a}hn and Joosep Link and Raivo Stern and Heikkil{\"a}, {Mikko J.} and Mikko Ritala and Markku Leskel{\"a}",
year = "2018",
doi = "10.1149/2.0021806jss",
language = "English",
volume = "7",
pages = "P287--P294",
journal = "ECS Journal of Solid State Science and Technology",
issn = "2162-8769",
publisher = "ELECTROCHEMICAL SOC INC",
number = "5",
}