@article{5d25c5acbacf487b94a8ec92dbf21d71,
title = "Atomic Layer Deposition of Emerging 2D Semiconductors, HfS2 and ZrS2, for Optoelectronics",
keywords = "OXIDE THIN-FILMS, TRANSISTORS, CARBON, 116 Chemical sciences",
author = "Miika Mattinen and Georgi Popov and Marko Vehkam{\"a}ki and King, {Peter J.} and Kenichiro Mizohata and Pasi Jalkanen and Jyrki R{\"a}is{\"a}nen and Markku Leskel{\"a} and Mikko Ritala",
year = "2019",
month = aug,
day = "13",
doi = "10.1021/acs.chemmater.9b01688",
language = "English",
volume = "31",
pages = "5713--5724",
journal = "Chemistry of Materials",
issn = "0897-4756",
publisher = "American Chemical Society",
number = "15",
}