Atomic Layer Deposition of Zinc Glutarate Thin Films

Leo Daniel Salmi, Miika Juhana Mattinen, Teemu Yrjö Manuel Niemi, Mikko Juhani Heikkilä, Kenichiro Mizohata, Sanna Korhonen, Sami-Pekka Hirvonen, Jyrki Antero Räisänen, Mikko Kalervo Ritala

Tutkimustuotos: Artikkelijulkaisu › Artikkeli › Tieteellinen › vertaisarvioitu

Kuvaus

Deposition of zinc glutarate thin films by atomic layer deposition is studied at 200-250 degrees C using zinc acetate and glutaric acid as the precursors. The films are characterized by UV-vis spectrophotometry, X-ray diffraction, Fourier transform infrared spectroscopy, field emission scanning electron microscopy, energy-dispersive X-ray spectroscopy, atomic force microscopy, and time-of-flight elastic recoil detection analysis. According to X-ray diffraction, the films deposited at 200 degrees C are crystalline with a crystal structure matching to zinc glutarate. The elastic recoil detection analysis shows that the composition of the films is a close match to zinc glutarate. Catalytic activity of the films is demonstrated using the copolymerization reaction of propylene oxide and CO2
Alkuperäiskielienglanti
Artikkeli1700512
LehtiAdvanced Materials Interfaces
Vuosikerta4
Numero22
Sivumäärä6
ISSN2196-7350
DOI - pysyväislinkit
TilaJulkaistu - syyskuuta 2017
OKM-julkaisutyyppiA1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä, vertaisarvioitu

Tieteenalat

  • 116 Kemia
  • 221 Nanoteknologia
  • 216 Materiaalitekniikka

Lainaa tätä

Salmi, Leo Daniel ; Mattinen, Miika Juhana ; Niemi, Teemu Yrjö Manuel ; Heikkilä, Mikko Juhani ; Mizohata, Kenichiro ; Korhonen, Sanna ; Hirvonen, Sami-Pekka ; Räisänen, Jyrki Antero ; Ritala, Mikko Kalervo. / Atomic Layer Deposition of Zinc Glutarate Thin Films. Julkaisussa: Advanced Materials Interfaces . 2017 ; Vuosikerta 4, Nro 22.
@article{84149d7f45514b23ae0db736ffaf8bd1,
title = "Atomic Layer Deposition of Zinc Glutarate Thin Films",
abstract = "Deposition of zinc glutarate thin films by atomic layer deposition is studied at 200-250 degrees C using zinc acetate and glutaric acid as the precursors. The films are characterized by UV-vis spectrophotometry, X-ray diffraction, Fourier transform infrared spectroscopy, field emission scanning electron microscopy, energy-dispersive X-ray spectroscopy, atomic force microscopy, and time-of-flight elastic recoil detection analysis. According to X-ray diffraction, the films deposited at 200 degrees C are crystalline with a crystal structure matching to zinc glutarate. The elastic recoil detection analysis shows that the composition of the films is a close match to zinc glutarate. Catalytic activity of the films is demonstrated using the copolymerization reaction of propylene oxide and CO2",
keywords = "116 Chemical sciences, 221 Nano-technology, 216 Materials engineering",
author = "Salmi, {Leo Daniel} and Mattinen, {Miika Juhana} and Niemi, {Teemu Yrj{\"o} Manuel} and Heikkil{\"a}, {Mikko Juhani} and Kenichiro Mizohata and Sanna Korhonen and Sami-Pekka Hirvonen and R{\"a}is{\"a}nen, {Jyrki Antero} and Ritala, {Mikko Kalervo}",
year = "2017",
month = "9",
doi = "10.1002/admi.201700512",
language = "English",
volume = "4",
journal = "Advanced Materials Interfaces",
issn = "2196-7350",
publisher = "Wiley",
number = "22",

}

Salmi, LD, Mattinen, MJ, Niemi, TYM, Heikkilä, MJ, Mizohata, K, Korhonen, S, Hirvonen, S-P, Räisänen, JA & Ritala, MK 2017, 'Atomic Layer Deposition of Zinc Glutarate Thin Films', Advanced Materials Interfaces , Vuosikerta 4, Nro 22, 1700512 . https://doi.org/10.1002/admi.201700512

Atomic Layer Deposition of Zinc Glutarate Thin Films. / Salmi, Leo Daniel; Mattinen, Miika Juhana; Niemi, Teemu Yrjö Manuel; Heikkilä, Mikko Juhani; Mizohata, Kenichiro; Korhonen, Sanna; Hirvonen, Sami-Pekka; Räisänen, Jyrki Antero; Ritala, Mikko Kalervo.

julkaisussa: Advanced Materials Interfaces , Vuosikerta 4, Nro 22, 1700512 , 09.2017.

Tutkimustuotos: Artikkelijulkaisu › Artikkeli › Tieteellinen › vertaisarvioitu

TY - JOUR

T1 - Atomic Layer Deposition of Zinc Glutarate Thin Films

AU - Salmi, Leo Daniel

AU - Mattinen, Miika Juhana

AU - Niemi, Teemu Yrjö Manuel

AU - Heikkilä, Mikko Juhani

AU - Mizohata, Kenichiro

AU - Korhonen, Sanna

AU - Hirvonen, Sami-Pekka

AU - Räisänen, Jyrki Antero

AU - Ritala, Mikko Kalervo

PY - 2017/9

Y1 - 2017/9

N2 - Deposition of zinc glutarate thin films by atomic layer deposition is studied at 200-250 degrees C using zinc acetate and glutaric acid as the precursors. The films are characterized by UV-vis spectrophotometry, X-ray diffraction, Fourier transform infrared spectroscopy, field emission scanning electron microscopy, energy-dispersive X-ray spectroscopy, atomic force microscopy, and time-of-flight elastic recoil detection analysis. According to X-ray diffraction, the films deposited at 200 degrees C are crystalline with a crystal structure matching to zinc glutarate. The elastic recoil detection analysis shows that the composition of the films is a close match to zinc glutarate. Catalytic activity of the films is demonstrated using the copolymerization reaction of propylene oxide and CO2

AB - Deposition of zinc glutarate thin films by atomic layer deposition is studied at 200-250 degrees C using zinc acetate and glutaric acid as the precursors. The films are characterized by UV-vis spectrophotometry, X-ray diffraction, Fourier transform infrared spectroscopy, field emission scanning electron microscopy, energy-dispersive X-ray spectroscopy, atomic force microscopy, and time-of-flight elastic recoil detection analysis. According to X-ray diffraction, the films deposited at 200 degrees C are crystalline with a crystal structure matching to zinc glutarate. The elastic recoil detection analysis shows that the composition of the films is a close match to zinc glutarate. Catalytic activity of the films is demonstrated using the copolymerization reaction of propylene oxide and CO2

KW - 116 Chemical sciences

KW - 221 Nano-technology

KW - 216 Materials engineering

U2 - 10.1002/admi.201700512

DO - 10.1002/admi.201700512

M3 - Article

VL - 4

JO - Advanced Materials Interfaces

JF - Advanced Materials Interfaces

SN - 2196-7350

IS - 22

M1 - 1700512

ER -

Salmi LD, Mattinen MJ, Niemi TYM, Heikkilä MJ, Mizohata K, Korhonen S et al. Atomic Layer Deposition of Zinc Glutarate Thin Films. Advanced Materials Interfaces . 2017 syys;4(22). 1700512 . https://doi.org/10.1002/admi.201700512

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