@article{78bc599c5fb643288868050182eda218,
title = "Cyclopentadienyl Precursors for the Atomic Layer Deposition of Erbium Oxide Thin Films",
keywords = "ALD, Er2O3, Thin films, CHEMICAL-VAPOR-DEPOSITION, RARE-EARTH-OXIDES, BETA-DIKETONATE, DIELECTRICS, (CPME)(3)ER, OXIDATION, COMPLEXES, GROWTH, OZONE, 116 Chemical sciences",
author = "Timothee Blanquart and Mikko Kaipio and Jaakko Niinist{\"o} and Marco Gavagnin and Valentino Longo and Laurie Blanquart and Clement Lansalot and W. Noh and Wanzenb{\"o}ck, {Heinz D.} and Mikko Ritala and Markku Leskel{\"a}",
year = "2014",
month = sep,
doi = "10.1002/cvde.201407116",
language = "English",
volume = "20",
pages = "217--223",
journal = "Chemical Vapor Deposition",
issn = "0948-1907",
publisher = "Wiley-VCH",
number = "7-9",
}