@article{f8cf47fc294e412ea24e032e78f08983,
title = "Defect and density evolution under high-fluence ion irradiation of Si/SiO2 heterostructures",
keywords = "SINGLE-ELECTRON TRANSISTOR, SILICON QUANTUM-DOT, MOLECULAR-DYNAMICS, SI NANOCRYSTALS, NANOCLUSTER FORMATION, LAYER FORMATION, BEAM SYNTHESIS, SIMULATION, RADIATION, DENSIFICATION, 114 Physical sciences",
author = "F. Djurabekova and C. Fridlund and K. Nordlund",
year = "2020",
month = jan,
day = "3",
doi = "10.1103/PhysRevMaterials.4.013601",
language = "English",
volume = "4",
journal = "Physical Review Materials",
issn = "2475-9953",
publisher = "AVS",
number = "1",
}