Experimental light scattering by small particles

First results with a novel Mueller matrix scatterometer

Tutkimustuotos: ArtikkelijulkaisuKonferenssiartikkeliTieteellinenvertaisarvioitu

Kuvaus

We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.
Alkuperäiskielienglanti
Artikkeli10330 0A
LehtiProceedings of SPIE, the International Society for Optical Engineering
Vuosikerta10330
Sivumäärä7
ISSN0277-786X
DOI - pysyväislinkit
TilaJulkaistu - 2017
OKM-julkaisutyyppiA4 Artikkeli konferenssijulkaisuussa
TapahtumaConference on Modeling Aspects in Optical Metrology - Munich, Saksa
Kesto: 26 kesäkuuta 201728 kesäkuuta 2017
Konferenssinumero: VI

Lisätietoja


Volume: 10330
Host publication title: Modeling Aspects in Optical Metrology VI
Proceeding volume:
Isbn(print): 978-1-5106-1106-1
Isbn(electronic): 978-1-5106-1105-4

Tieteenalat

  • 114 Fysiikka

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title = "Experimental light scattering by small particles: First results with a novel Mueller matrix scatterometer",
abstract = "We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.",
keywords = "114 Physical sciences",
author = "Antti Penttil{\"a} and G{\"o}ran Maconi and Ivan Kassamakov and Maria Gritsevich and Petteri Helander and Tuomas Puranen and Edward Haeggstr{\"o}m and Karri Muinonen",
note = "Volume: 10330 Host publication title: Modeling Aspects in Optical Metrology VI Proceeding volume: Isbn(print): 978-1-5106-1106-1 Isbn(electronic): 978-1-5106-1105-4",
year = "2017",
doi = "10.1117/12.2267863",
language = "English",
volume = "10330",
journal = "Proceedings of SPIE, the International Society for Optical Engineering",
issn = "0277-786X",
publisher = "SPIE, The International Society for Optical Engineering",

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TY - JOUR

T1 - Experimental light scattering by small particles

T2 - First results with a novel Mueller matrix scatterometer

AU - Penttilä, Antti

AU - Maconi, Göran

AU - Kassamakov, Ivan

AU - Gritsevich, Maria

AU - Helander, Petteri

AU - Puranen, Tuomas

AU - Haeggström, Edward

AU - Muinonen, Karri

N1 - Volume: 10330 Host publication title: Modeling Aspects in Optical Metrology VI Proceeding volume: Isbn(print): 978-1-5106-1106-1 Isbn(electronic): 978-1-5106-1105-4

PY - 2017

Y1 - 2017

N2 - We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.

AB - We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.

KW - 114 Physical sciences

U2 - 10.1117/12.2267863

DO - 10.1117/12.2267863

M3 - Conference article

VL - 10330

JO - Proceedings of SPIE, the International Society for Optical Engineering

JF - Proceedings of SPIE, the International Society for Optical Engineering

SN - 0277-786X

M1 - 10330 0A

ER -