Experimental light scattering by small particles: First results with a novel Mueller matrix scatterometer

Antti Penttilä; Göran Maconi; Ivan Kassamakov; Maria Gritsevich; Petteri Helander; Tuomas Puranen; Edward Haeggström; Karri Muinonen

doi:10.1117/12.2267863

Experimental light scattering by small particles: First results with a novel Mueller matrix scatterometer

Antti Penttilä, Göran Maconi, Ivan Kassamakov, Maria Gritsevich, Petteri Helander, Tuomas Puranen, Edward Haeggström, Karri Muinonen

Tutkimustuotos: Artikkelijulkaisu › Konferenssiartikkeli › Tieteellinen › vertaisarvioitu

Abstrakti

We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.

Alkuperäiskieli	englanti
Artikkeli	10330 0A
Lehti	Proceedings of SPIE, the International Society for Optical Engineering
Vuosikerta	10330
Sivumäärä	7
ISSN	0277-786X
DOI - pysyväislinkit	https://doi.org/10.1117/12.2267863
Tila	Julkaistu - 2017
OKM-julkaisutyyppi	A4 Artikkeli konferenssijulkaisuussa
Tapahtuma	Conference on Modeling Aspects in Optical Metrology - Munich, Saksa Kesto: 26 kesäk. 2017 → 28 kesäk. 2017 Konferenssinumero: VI

Lisätietoja

Volume: 10330
Host publication title: Modeling Aspects in Optical Metrology VI
Isbn(print): 978-1-5106-1106-1
Isbn(electronic): 978-1-5106-1105-4

Tieteenalat

114 Fysiikka

Pääsy asiakirjaan

10.1117/12.2267863

Draft copyHyväksytty kirjoittajan käsikirjoitus, 3,21 MB

ERC Advanced Grant project SAEMPL (No. 320733)
Muinonen, K., Peltoniemi, J., Penttilä, A., Markkanen, J., Zubko, E., Pentikäinen, H., Guirado Rodriguez, D., Gritsevich, M., Kassamakov, I., Harju, J., Pelkonen, V., Väisänen, T., Martikainen, J., Herranen, J., Maconi, G., Helander, P. & Rantakylä, J.
01/04/2013 → 31/03/2018
Projekti: Tutkimusprojekti

Siteeraa tätä

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title = "Experimental light scattering by small particles: First results with a novel Mueller matrix scatterometer",

abstract = "We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.",

keywords = "114 Physical sciences",

author = "Antti Penttil{\"a} and G{\"o}ran Maconi and Ivan Kassamakov and Maria Gritsevich and Petteri Helander and Tuomas Puranen and Edward Haeggstr{\"o}m and Karri Muinonen",

note = " Volume: 10330 Host publication title: Modeling Aspects in Optical Metrology VI Isbn(print): 978-1-5106-1106-1 Isbn(electronic): 978-1-5106-1105-4; Conference on Modeling Aspects in Optical Metrology ; Conference date: 26-06-2017 Through 28-06-2017",

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volume = "10330",

journal = "Proceedings of SPIE, the International Society for Optical Engineering",

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publisher = "SPIE, The International Society for Optical Engineering",

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Experimental light scattering by small particles : First results with a novel Mueller matrix scatterometer. / Penttilä, Antti ; Maconi, Göran ; Kassamakov, Ivan et al.

julkaisussa: Proceedings of SPIE, the International Society for Optical Engineering, Vuosikerta 10330, 10330 0A, 2017.

Tutkimustuotos: Artikkelijulkaisu › Konferenssiartikkeli › Tieteellinen › vertaisarvioitu

TY - JOUR

T1 - Experimental light scattering by small particles

T2 - Conference on Modeling Aspects in Optical Metrology

AU - Penttilä, Antti

AU - Maconi, Göran

AU - Kassamakov, Ivan

AU - Gritsevich, Maria

AU - Helander, Petteri

AU - Puranen, Tuomas

AU - Haeggström, Edward

AU - Muinonen, Karri

N1 - Conference code: VI

PY - 2017

Y1 - 2017

N2 - We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.

AB - We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.

KW - 114 Physical sciences

U2 - 10.1117/12.2267863

DO - 10.1117/12.2267863

M3 - Conference article

VL - 10330

JO - Proceedings of SPIE, the International Society for Optical Engineering

JF - Proceedings of SPIE, the International Society for Optical Engineering

SN - 0277-786X

M1 - 10330 0A

Y2 - 26 June 2017 through 28 June 2017

ER -

Experimental light scattering by small particles: First results with a novel Mueller matrix scatterometer

Abstrakti

Lisätietoja

Tieteenalat

Pääsy asiakirjaan

Projektit

ERC Advanced Grant project SAEMPL (No. 320733)

Siteeraa tätä