@article{1d9eb02725934e598115dad04bef3d82,
title = "Growth of highly conductive Al-rich AlGaN:Si with low group-III vacancy concentration",
keywords = "114 Physical sciences, OPTOELECTRONIC DEVICES, ULTRAVIOLET, NITRIDE, TEMPERATURE, DEPOSITION, DEFECTS, DENSITY, LAYERS, STATE",
author = "Almogbel, {Abdullah S.} and Zollner, {Christian J.} and Saifaddin, {Burhan K.} and Michael Iza and Jianfeng Wang and Yifan Yao and Michael Wang and Humberto Foronda and Igor Prozheev and Filip Tuomisto and Abdulrahman Albadri and Shuji Nakamura and DenBaars, {Steven P.} and Speck, {James S.}",
note = "Publisher Copyright: {\textcopyright} 2021 Author(s).",
year = "2021",
month = sep,
day = "1",
doi = "10.1063/5.0066652",
language = "English",
volume = "11",
journal = "AIP Advances",
issn = "2158-3226",
publisher = "American Institute of Physics",
number = "9",
}