Hybrid light source for scanning white light interferometry-based MEMS quality control

Ville Heikkinen, Kalle Hanhijärvi, Juha Pekka Aaltonen, Heikki Räikkönen, Ben Wälchli, Tor Paulin, Ivan Vladislavov Kassamakov, Kestutis Grigoras, Sami Franssila, Edward Haeggström

Tutkimustuotos: Artikkeli kirjassa/raportissa/konferenssijulkaisussaKonferenssiartikkeliTieteellinenvertaisarvioitu

Kuvaus

We apply a hybrid light source with adjustable spectrum to Scanning White Light Interferometric MEMS device characterization. The source combines light from a blue laser (409 nm), a fluorescent material (emission peak 521 nm), amber LED (597 nm) and cyan LED (505 nm) to cover the visible wavelengths. The Gaussian spectrum of the light source reduces interference ringing and improves surface localization, which is important when imaging diffuse surfaces or layered structures. The new light source allows both stroboscopic illumination and spectrum shaping during a measurement. Changing the illumination spectrum allows one to maximize the reflection from the measured surface - compared to reflections from other surfaces - as a mean to improve signal-to-noise-ratio. To validate the source we measured static MEMS samples featuring known step heights using the light source at three different mean wavelengths (508 nm, 524 nm and 579 nm). The measured step heights (7.029 ± 0.045 μm, 7.002 ± 0.041 μm and 7.005 ± 0.056 μm) were close to those measured using a halogen lamp (7.025 ± 0.020 μm). Interferograms without the side lobes typical for white LEDs were achieved. The FWHM of the interferogram of the combined light source was (1.859 ± 0.008 μm).
Alkuperäiskielienglanti
OtsikkoOptical Measurement Systems for Industrial Inspection
Sivumäärä8
Vuosikerta8082
JulkaisupaikkaMunich
KustantajaSPIE
Julkaisupäivätoukokuuta 2011
Sivut80822O-1 - 80822O-8
DOI - pysyväislinkit
TilaJulkaistu - toukokuuta 2011
OKM-julkaisutyyppiA4 Artikkeli konferenssijulkaisuussa
TapahtumaOptical Measurement Systems for Industrial Inspection VII - Munich, Saksa
Kesto: 23 toukokuuta 2011 → …
Konferenssinumero: 7

Julkaisusarja

NimiProceedings of SPIE
KustantajaSPIE
Vuosikerta8082

Tieteenalat

  • 114 Fysiikka

Lainaa tätä

Heikkinen, V., Hanhijärvi, K., Aaltonen, J. P., Räikkönen, H., Wälchli, B., Paulin, T., ... Haeggström, E. (2011). Hybrid light source for scanning white light interferometry-based MEMS quality control. teoksessa Optical Measurement Systems for Industrial Inspection (Vuosikerta 8082, Sivut 80822O-1 - 80822O-8). (Proceedings of SPIE; Vuosikerta 8082). Munich: SPIE. https://doi.org/10.1117/12.889362
Heikkinen, Ville ; Hanhijärvi, Kalle ; Aaltonen, Juha Pekka ; Räikkönen, Heikki ; Wälchli, Ben ; Paulin, Tor ; Kassamakov, Ivan Vladislavov ; Grigoras, Kestutis ; Franssila, Sami ; Haeggström, Edward. / Hybrid light source for scanning white light interferometry-based MEMS quality control. Optical Measurement Systems for Industrial Inspection . Vuosikerta 8082 Munich : SPIE, 2011. Sivut 80822O-1 - 80822O-8 (Proceedings of SPIE).
@inproceedings{fac82c2e41d04373b1e0f65a6c0ddc33,
title = "Hybrid light source for scanning white light interferometry-based MEMS quality control",
abstract = "We apply a hybrid light source with adjustable spectrum to Scanning White Light Interferometric MEMS device characterization. The source combines light from a blue laser (409 nm), a fluorescent material (emission peak 521 nm), amber LED (597 nm) and cyan LED (505 nm) to cover the visible wavelengths. The Gaussian spectrum of the light source reduces interference ringing and improves surface localization, which is important when imaging diffuse surfaces or layered structures. The new light source allows both stroboscopic illumination and spectrum shaping during a measurement. Changing the illumination spectrum allows one to maximize the reflection from the measured surface - compared to reflections from other surfaces - as a mean to improve signal-to-noise-ratio. To validate the source we measured static MEMS samples featuring known step heights using the light source at three different mean wavelengths (508 nm, 524 nm and 579 nm). The measured step heights (7.029 ± 0.045 μm, 7.002 ± 0.041 μm and 7.005 ± 0.056 μm) were close to those measured using a halogen lamp (7.025 ± 0.020 μm). Interferograms without the side lobes typical for white LEDs were achieved. The FWHM of the interferogram of the combined light source was (1.859 ± 0.008 μm).",
keywords = "114 Physical sciences, Scanning White Light Interferometry, LED, laser, fluorescence, quality control, MEMS",
author = "Ville Heikkinen and Kalle Hanhij{\"a}rvi and Aaltonen, {Juha Pekka} and Heikki R{\"a}ikk{\"o}nen and Ben W{\"a}lchli and Tor Paulin and Kassamakov, {Ivan Vladislavov} and Kestutis Grigoras and Sami Franssila and Edward Haeggstr{\"o}m",
note = "Volume: Proceeding volume: 8082",
year = "2011",
month = "5",
doi = "10.1117/12.889362",
language = "English",
volume = "8082",
series = "Proceedings of SPIE",
publisher = "SPIE",
pages = "80822O--1 -- 80822O--8",
booktitle = "Optical Measurement Systems for Industrial Inspection",
address = "United States",

}

Heikkinen, V, Hanhijärvi, K, Aaltonen, JP, Räikkönen, H, Wälchli, B, Paulin, T, Kassamakov, IV, Grigoras, K, Franssila, S & Haeggström, E 2011, Hybrid light source for scanning white light interferometry-based MEMS quality control. julkaisussa Optical Measurement Systems for Industrial Inspection . Vuosikerta 8082, Proceedings of SPIE, Vuosikerta 8082, SPIE, Munich, Sivut 80822O-1 - 80822O-8, Optical Measurement Systems for Industrial Inspection VII, Munich, Saksa, 23/05/2011. https://doi.org/10.1117/12.889362

Hybrid light source for scanning white light interferometry-based MEMS quality control. / Heikkinen, Ville; Hanhijärvi, Kalle; Aaltonen, Juha Pekka; Räikkönen, Heikki; Wälchli, Ben; Paulin, Tor; Kassamakov, Ivan Vladislavov; Grigoras, Kestutis; Franssila, Sami; Haeggström, Edward.

Optical Measurement Systems for Industrial Inspection . Vuosikerta 8082 Munich : SPIE, 2011. s. 80822O-1 - 80822O-8 (Proceedings of SPIE; Vuosikerta 8082).

Tutkimustuotos: Artikkeli kirjassa/raportissa/konferenssijulkaisussaKonferenssiartikkeliTieteellinenvertaisarvioitu

TY - GEN

T1 - Hybrid light source for scanning white light interferometry-based MEMS quality control

AU - Heikkinen, Ville

AU - Hanhijärvi, Kalle

AU - Aaltonen, Juha Pekka

AU - Räikkönen, Heikki

AU - Wälchli, Ben

AU - Paulin, Tor

AU - Kassamakov, Ivan Vladislavov

AU - Grigoras, Kestutis

AU - Franssila, Sami

AU - Haeggström, Edward

N1 - Volume: Proceeding volume: 8082

PY - 2011/5

Y1 - 2011/5

N2 - We apply a hybrid light source with adjustable spectrum to Scanning White Light Interferometric MEMS device characterization. The source combines light from a blue laser (409 nm), a fluorescent material (emission peak 521 nm), amber LED (597 nm) and cyan LED (505 nm) to cover the visible wavelengths. The Gaussian spectrum of the light source reduces interference ringing and improves surface localization, which is important when imaging diffuse surfaces or layered structures. The new light source allows both stroboscopic illumination and spectrum shaping during a measurement. Changing the illumination spectrum allows one to maximize the reflection from the measured surface - compared to reflections from other surfaces - as a mean to improve signal-to-noise-ratio. To validate the source we measured static MEMS samples featuring known step heights using the light source at three different mean wavelengths (508 nm, 524 nm and 579 nm). The measured step heights (7.029 ± 0.045 μm, 7.002 ± 0.041 μm and 7.005 ± 0.056 μm) were close to those measured using a halogen lamp (7.025 ± 0.020 μm). Interferograms without the side lobes typical for white LEDs were achieved. The FWHM of the interferogram of the combined light source was (1.859 ± 0.008 μm).

AB - We apply a hybrid light source with adjustable spectrum to Scanning White Light Interferometric MEMS device characterization. The source combines light from a blue laser (409 nm), a fluorescent material (emission peak 521 nm), amber LED (597 nm) and cyan LED (505 nm) to cover the visible wavelengths. The Gaussian spectrum of the light source reduces interference ringing and improves surface localization, which is important when imaging diffuse surfaces or layered structures. The new light source allows both stroboscopic illumination and spectrum shaping during a measurement. Changing the illumination spectrum allows one to maximize the reflection from the measured surface - compared to reflections from other surfaces - as a mean to improve signal-to-noise-ratio. To validate the source we measured static MEMS samples featuring known step heights using the light source at three different mean wavelengths (508 nm, 524 nm and 579 nm). The measured step heights (7.029 ± 0.045 μm, 7.002 ± 0.041 μm and 7.005 ± 0.056 μm) were close to those measured using a halogen lamp (7.025 ± 0.020 μm). Interferograms without the side lobes typical for white LEDs were achieved. The FWHM of the interferogram of the combined light source was (1.859 ± 0.008 μm).

KW - 114 Physical sciences

KW - Scanning White Light Interferometry

KW - LED

KW - laser

KW - fluorescence

KW - quality control

KW - MEMS

U2 - 10.1117/12.889362

DO - 10.1117/12.889362

M3 - Conference contribution

VL - 8082

T3 - Proceedings of SPIE

SP - 80822O-1 - 80822O-8

BT - Optical Measurement Systems for Industrial Inspection

PB - SPIE

CY - Munich

ER -

Heikkinen V, Hanhijärvi K, Aaltonen JP, Räikkönen H, Wälchli B, Paulin T et al. Hybrid light source for scanning white light interferometry-based MEMS quality control. julkaisussa Optical Measurement Systems for Industrial Inspection . Vuosikerta 8082. Munich: SPIE. 2011. s. 80822O-1 - 80822O-8. (Proceedings of SPIE). https://doi.org/10.1117/12.889362