@article{fe0dc5950d2d48d9ae4bd89096469811,
title = "In-grown and irradiation-induced Al and N vacancies in 100 keV H+ implanted AlN single crystals",
keywords = "Defects, Nitrides, Positron annihilation, Semiconductors, 114 Physical sciences, 221 Nano-technology, 216 Materials engineering",
author = "Igor Prozheev and Heikkinen, {Tanja Niina Piritta} and Ilja Makkonen and Kenichiro Mizohata and Filip Tuomisto",
year = "2024",
month = jul,
day = "1",
doi = "10.35848/1347-4065/ad52da",
language = "English",
volume = "63",
journal = "Japanese journal of applied physics part 1-Regular papers short notes & review papers",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "7",
}