Infrared Scanning White Light Interferometry Using a Solid State Light Source

Ville Heikkinen; Juha Pekka Aaltonen; Ben Wälchli; Heikki Räikkönen; Ivan Vladislavov Kassamakov; Tania Cholakova; Kestutis Grigoras; Sami Franssila; Roumen Kakanakov; Edward Haeggström

doi:10.1117/12.874966

Infrared Scanning White Light Interferometry Using a Solid State Light Source

Ville Heikkinen, Juha Pekka Aaltonen, Ben Wälchli, Heikki Räikkönen, Ivan Vladislavov Kassamakov, Tania Cholakova, Kestutis Grigoras, Sami Franssila, Roumen Kakanakov, Edward Haeggström

Tutkimustuotos: Artikkeli kirjassa/raportissa/konferenssijulkaisussa › Konferenssiartikkeli › Tieteellinen › vertaisarvioitu

Abstrakti

Scanning White Light Interferometry (SWLI) allows surface characterization of MEMS components. With transparent samples SWLI can image multiple stacked layers. However, since silicon is opaque to visible wavelengths, only the top layer can be measured using visible light. We combined multiple infrared light emitting diodes (IR-LEDs) to achieve adjustable IR illumination. This allows simultaneous measurement of top and bottom surface topographies of silicon samples - such as MEMS membranes- using a SWLI equipped with an IR camera. This advances the state of the art of the field of MEMS characterization by allowing looking under membranes of these devices during operation.

Alkuperäiskieli	englanti
Otsikko	Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices
Sivumäärä	9
Vuosikerta	7928
Julkaisupaikka	San Francisco
Kustantaja	SPIE
Julkaisupäivä	25 helmik. 2011
Sivut	792809-1 - 792809-9
DOI - pysyväislinkit	https://doi.org/10.1117/12.874966
Tila	Julkaistu - 25 helmik. 2011
OKM-julkaisutyyppi	A4 Artikkeli konferenssijulkaisuussa
Tapahtuma	Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X - San Francisco, Yhdysvallat (USA) Kesto: 24 tammik. 2011 → 24 tammik. 2011 Konferenssinumero: 10

Julkaisusarja

Nimi	Proceedings of SPIE
Kustantaja	SPIE
Vuosikerta	7928

Lisätietoja

Proceeding volume: 7928

Tieteenalat

114 Fysiikka

Pääsy asiakirjaan

10.1117/12.874966

http://dx.doi.org/10.1117/12.874966

Siteeraa tätä

Heikkinen, V., Aaltonen, J. P., Wälchli, B., Räikkönen, H., Kassamakov, I. V., Cholakova, T., Grigoras, K., Franssila, S., Kakanakov, R., & Haeggström, E. (2011). Infrared Scanning White Light Interferometry Using a Solid State Light Source. teoksessa Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices (Vuosikerta 7928, Sivut 792809-1 - 792809-9). (Proceedings of SPIE; Vuosikerta 7928). SPIE. https://doi.org/10.1117/12.874966

@inproceedings{e9e8df47f2f3432395daefcb083dd136,

title = "Infrared Scanning White Light Interferometry Using a Solid State Light Source",

abstract = "Scanning White Light Interferometry (SWLI) allows surface characterization of MEMS components. With transparent samples SWLI can image multiple stacked layers. However, since silicon is opaque to visible wavelengths, only the top layer can be measured using visible light. We combined multiple infrared light emitting diodes (IR-LEDs) to achieve adjustable IR illumination. This allows simultaneous measurement of top and bottom surface topographies of silicon samples - such as MEMS membranes- using a SWLI equipped with an IR camera. This advances the state of the art of the field of MEMS characterization by allowing looking under membranes of these devices during operation.",

keywords = "114 Physical sciences, Scanning White Light Interferometry, LED, Infrared, MEMS",

author = "Ville Heikkinen and Aaltonen, {Juha Pekka} and Ben W{\"a}lchli and Heikki R{\"a}ikk{\"o}nen and Kassamakov, {Ivan Vladislavov} and Tania Cholakova and Kestutis Grigoras and Sami Franssila and Roumen Kakanakov and Edward Haeggstr{\"o}m",

note = " Proceeding volume: 7928; Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X ; Conference date: 24-01-2011 Through 24-01-2011",

year = "2011",

month = feb,

day = "25",

doi = "10.1117/12.874966",

language = "English",

volume = "7928",

series = "Proceedings of SPIE",

publisher = "SPIE",

pages = "792809--1 -- 792809--9",

booktitle = "Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices",

address = "United States",

}

Heikkinen, V, Aaltonen, JP, Wälchli, B, Räikkönen, H , Kassamakov, IV, Cholakova, T, Grigoras, K, Franssila, S, Kakanakov, R & Haeggström, E 2011, Infrared Scanning White Light Interferometry Using a Solid State Light Source. julkaisussa Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices . Vuosikerta 7928, Proceedings of SPIE, Vuosikerta 7928, SPIE, San Francisco, Sivut 792809-1 - 792809-9, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X, San Francisco, Yhdysvallat (USA), 24/01/2011. https://doi.org/10.1117/12.874966

Infrared Scanning White Light Interferometry Using a Solid State Light Source. / Heikkinen, Ville; Aaltonen, Juha Pekka; Wälchli, Ben et al.

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices . Vuosikerta 7928 San Francisco : SPIE, 2011. s. 792809-1 - 792809-9 (Proceedings of SPIE; Vuosikerta 7928).

Tutkimustuotos: Artikkeli kirjassa/raportissa/konferenssijulkaisussa › Konferenssiartikkeli › Tieteellinen › vertaisarvioitu

TY - GEN

T1 - Infrared Scanning White Light Interferometry Using a Solid State Light Source

AU - Heikkinen, Ville

AU - Aaltonen, Juha Pekka

AU - Wälchli, Ben

AU - Räikkönen, Heikki

AU - Kassamakov, Ivan Vladislavov

AU - Cholakova, Tania

AU - Grigoras, Kestutis

AU - Franssila, Sami

AU - Kakanakov, Roumen

AU - Haeggström, Edward

N1 - Conference code: 10

PY - 2011/2/25

Y1 - 2011/2/25

N2 - Scanning White Light Interferometry (SWLI) allows surface characterization of MEMS components. With transparent samples SWLI can image multiple stacked layers. However, since silicon is opaque to visible wavelengths, only the top layer can be measured using visible light. We combined multiple infrared light emitting diodes (IR-LEDs) to achieve adjustable IR illumination. This allows simultaneous measurement of top and bottom surface topographies of silicon samples - such as MEMS membranes- using a SWLI equipped with an IR camera. This advances the state of the art of the field of MEMS characterization by allowing looking under membranes of these devices during operation.

AB - Scanning White Light Interferometry (SWLI) allows surface characterization of MEMS components. With transparent samples SWLI can image multiple stacked layers. However, since silicon is opaque to visible wavelengths, only the top layer can be measured using visible light. We combined multiple infrared light emitting diodes (IR-LEDs) to achieve adjustable IR illumination. This allows simultaneous measurement of top and bottom surface topographies of silicon samples - such as MEMS membranes- using a SWLI equipped with an IR camera. This advances the state of the art of the field of MEMS characterization by allowing looking under membranes of these devices during operation.

KW - 114 Physical sciences

KW - Scanning White Light Interferometry

KW - LED

KW - Infrared

KW - MEMS

U2 - 10.1117/12.874966

DO - 10.1117/12.874966

M3 - Conference contribution

VL - 7928

T3 - Proceedings of SPIE

SP - 792809-1 - 792809-9

BT - Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices

PB - SPIE

CY - San Francisco

T2 - Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X

Y2 - 24 January 2011 through 24 January 2011

ER -

Heikkinen V, Aaltonen JP, Wälchli B, Räikkönen H , Kassamakov IV, Cholakova T et al. Infrared Scanning White Light Interferometry Using a Solid State Light Source. julkaisussa Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices . Vuosikerta 7928. San Francisco: SPIE. 2011. s. 792809-1 - 792809-9. (Proceedings of SPIE). doi: 10.1117/12.874966