Investigation of change of the composition and structure of the CaF2/Si films surface at the low-energy bombardment

B. E. Umirzakov; D. A. Tashmukhamedova; M. K. Ruzibaeva; F. G. Djurabekova; S. B. Danaev

doi:10.1016/j.nimb.2013.10.094

Investigation of change of the composition and structure of the CaF2/Si films surface at the low-energy bombardment

B. E. Umirzakov
, D. A. Tashmukhamedova
, M. K. Ruzibaeva
, F. G. Djurabekova
, S. B. Danaev

Fysiikan osasto

Tutkimustuotos: Artikkelijulkaisu › Artikkeli › Tieteellinen › vertaisarvioitu

Alkuperäiskieli	englanti
Lehti	Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Vuosikerta	326
Sivut	322-325
Sivumäärä	4
ISSN	0168-583X
DOI - pysyväislinkit	https://doi.org/10.1016/j.nimb.2013.10.094
Tila	Julkaistu - 1 toukok. 2014
OKM-julkaisutyyppi	A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä, vertaisarvioitu

Tieteenalat

114 Fysiikka

Pääsy asiakirjaan

10.1016/j.nimb.2013.10.094

Siteeraa tätä

Umirzakov, B. E., Tashmukhamedova, D. A., Ruzibaeva, M. K., Djurabekova, F. G., & Danaev, S. B. (2014). Investigation of change of the composition and structure of the CaF2/Si films surface at the low-energy bombardment. Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 326, 322-325. https://doi.org/10.1016/j.nimb.2013.10.094

@article{b1e3ea7f8e4a4169a063accfe4e5d18e,

title = "Investigation of change of the composition and structure of the CaF2/Si films surface at the low-energy bombardment",

keywords = "Ion implantation, Spectroscopy, Fast-electron diffraction, Band gap, True secondary electrons, Nanocrystal, Surface nanostrucrures, ION-IMPLANTATION, NANOSTRUCTURES, 114 Physical sciences",

author = "Umirzakov, \{B. E.\} and Tashmukhamedova, \{D. A.\} and Ruzibaeva, \{M. K.\} and Djurabekova, \{F. G.\} and Danaev, \{S. B.\}",

year = "2014",

month = may,

day = "1",

doi = "10.1016/j.nimb.2013.10.094",

language = "English",

volume = "326",

pages = "322--325",

journal = "Nuclear Instruments \& Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier B.V.",

}

Umirzakov, BE, Tashmukhamedova, DA, Ruzibaeva, MK, Djurabekova, FG & Danaev, SB 2014, 'Investigation of change of the composition and structure of the CaF2/Si films surface at the low-energy bombardment', Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vuosikerta 326, Sivut 322-325. https://doi.org/10.1016/j.nimb.2013.10.094

Investigation of change of the composition and structure of the CaF2/Si films surface at the low-energy bombardment. / Umirzakov, B. E.; Tashmukhamedova, D. A.; Ruzibaeva, M. K. et al.
julkaisussa: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vuosikerta 326, 01.05.2014, s. 322-325.

Tutkimustuotos: Artikkelijulkaisu › Artikkeli › Tieteellinen › vertaisarvioitu

TY - JOUR

T1 - Investigation of change of the composition and structure of the CaF2/Si films surface at the low-energy bombardment

AU - Umirzakov, B. E.

AU - Tashmukhamedova, D. A.

AU - Ruzibaeva, M. K.

AU - Djurabekova, F. G.

AU - Danaev, S. B.

PY - 2014/5/1

Y1 - 2014/5/1

KW - Ion implantation

KW - Spectroscopy

KW - Fast-electron diffraction

KW - Band gap

KW - True secondary electrons

KW - Nanocrystal

KW - Surface nanostrucrures

KW - ION-IMPLANTATION

KW - NANOSTRUCTURES

KW - 114 Physical sciences

U2 - 10.1016/j.nimb.2013.10.094

DO - 10.1016/j.nimb.2013.10.094

M3 - Article

SN - 0168-583X

VL - 326

SP - 322

EP - 325

JO - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

ER -