Optical 3D-imaging with nanometer vertical resolution

Julkaisun otsikon käännös: Optinen 3d-kuvantaminen nanometrien vertikaalisella erottelukyvyllä

Tutkimustuotos: Artikkeli kirjassa/raportissa/konferenssijulkaisussaKonferenssiartikkeliTieteellinen

Kuvaus

Scanning white light interferometry (SWLI) is a powerful non-contact optical 3D-imaging technique that is used to obtain high resolution 3D-data from variety of samples. The SWLI has been used efficiently for imaging micro-electro-mechanical-system (MEMS) devices, producing sub-micron resolution 3D-data of sample structures.

The fast growing field of nanotechnology has set new demands on the resolution of im-aging devices. As nanoscale NEMS-devices are increasingly emerging, sub-micron reso-lution imaging is no longer sufficient.

We use our SWLI instrument to image a sample with nanoscale features to obtain 3D-images with sub-nanometer vertical resolution. We use stitching algorithms to produce large area 3D-data from multiple scans.
Alkuperäiskielienglanti
OtsikkoPROCEEDINGS OF THE XLIX ANNUAL CONFERENCE OF THE FINNISH PHYSICAL SOCIETY
Julkaisupäivämaaliskuuta 2015
ISBN (painettu)978-951-51-0584-4
TilaJulkaistu - maaliskuuta 2015
OKM-julkaisutyyppiB3 Vertaisarvioimaton artikkeli konferenssijulkaisussa
TapahtumaPhysics days / fysiikan päivät : annual meeting of the finnish physical society - Helsinki, Suomi
Kesto: 17 maaliskuuta 201519 maaliskuuta 2015
Konferenssinumero: 49

Lisätietoja


Volume:
Proceeding volume:

Tieteenalat

  • 114 Fysiikka

Lainaa tätä

Nolvi, A. M., Ylitalo, T. J., Viitala, T. J. S., Nyman, J., Kassamakov, I. V., Sandler, N., & Haeggström, E. O. (2015). Optical 3D-imaging with nanometer vertical resolution. teoksessa PROCEEDINGS OF THE XLIX ANNUAL CONFERENCE OF THE FINNISH PHYSICAL SOCIETY
@inproceedings{a4a5f4e43787457eaa775603d8f8e934,
title = "Optical 3D-imaging with nanometer vertical resolution",
abstract = "Scanning white light interferometry (SWLI) is a powerful non-contact optical 3D-imaging technique that is used to obtain high resolution 3D-data from variety of samples. The SWLI has been used efficiently for imaging micro-electro-mechanical-system (MEMS) devices, producing sub-micron resolution 3D-data of sample structures.The fast growing field of nanotechnology has set new demands on the resolution of im-aging devices. As nanoscale NEMS-devices are increasingly emerging, sub-micron reso-lution imaging is no longer sufficient.We use our SWLI instrument to image a sample with nanoscale features to obtain 3D-images with sub-nanometer vertical resolution. We use stitching algorithms to produce large area 3D-data from multiple scans.",
keywords = "114 Physical sciences",
author = "Nolvi, {Anton Mikael} and Ylitalo, {Tuomo Johannes} and Viitala, {Tapani Juhani Samuel} and Johan Nyman and Kassamakov, {Ivan Vladislavov} and Niklas Sandler and Haeggstr{\"o}m, {Edward Olof}",
note = "Volume: Proceeding volume:",
year = "2015",
month = "3",
language = "English",
isbn = "978-951-51-0584-4",
booktitle = "PROCEEDINGS OF THE XLIX ANNUAL CONFERENCE OF THE FINNISH PHYSICAL SOCIETY",

}

Nolvi, AM, Ylitalo, TJ, Viitala, TJS, Nyman, J, Kassamakov, IV, Sandler, N & Haeggström, EO 2015, Optical 3D-imaging with nanometer vertical resolution. julkaisussa PROCEEDINGS OF THE XLIX ANNUAL CONFERENCE OF THE FINNISH PHYSICAL SOCIETY. Physics days / fysiikan päivät : annual meeting of the finnish physical society, Helsinki, Suomi, 17/03/2015.

Optical 3D-imaging with nanometer vertical resolution. / Nolvi, Anton Mikael; Ylitalo, Tuomo Johannes; Viitala, Tapani Juhani Samuel; Nyman, Johan; Kassamakov, Ivan Vladislavov; Sandler, Niklas; Haeggström, Edward Olof.

PROCEEDINGS OF THE XLIX ANNUAL CONFERENCE OF THE FINNISH PHYSICAL SOCIETY. 2015.

Tutkimustuotos: Artikkeli kirjassa/raportissa/konferenssijulkaisussaKonferenssiartikkeliTieteellinen

TY - GEN

T1 - Optical 3D-imaging with nanometer vertical resolution

AU - Nolvi, Anton Mikael

AU - Ylitalo, Tuomo Johannes

AU - Viitala, Tapani Juhani Samuel

AU - Nyman, Johan

AU - Kassamakov, Ivan Vladislavov

AU - Sandler, Niklas

AU - Haeggström, Edward Olof

N1 - Volume: Proceeding volume:

PY - 2015/3

Y1 - 2015/3

N2 - Scanning white light interferometry (SWLI) is a powerful non-contact optical 3D-imaging technique that is used to obtain high resolution 3D-data from variety of samples. The SWLI has been used efficiently for imaging micro-electro-mechanical-system (MEMS) devices, producing sub-micron resolution 3D-data of sample structures.The fast growing field of nanotechnology has set new demands on the resolution of im-aging devices. As nanoscale NEMS-devices are increasingly emerging, sub-micron reso-lution imaging is no longer sufficient.We use our SWLI instrument to image a sample with nanoscale features to obtain 3D-images with sub-nanometer vertical resolution. We use stitching algorithms to produce large area 3D-data from multiple scans.

AB - Scanning white light interferometry (SWLI) is a powerful non-contact optical 3D-imaging technique that is used to obtain high resolution 3D-data from variety of samples. The SWLI has been used efficiently for imaging micro-electro-mechanical-system (MEMS) devices, producing sub-micron resolution 3D-data of sample structures.The fast growing field of nanotechnology has set new demands on the resolution of im-aging devices. As nanoscale NEMS-devices are increasingly emerging, sub-micron reso-lution imaging is no longer sufficient.We use our SWLI instrument to image a sample with nanoscale features to obtain 3D-images with sub-nanometer vertical resolution. We use stitching algorithms to produce large area 3D-data from multiple scans.

KW - 114 Physical sciences

UR - http://fp2015.physics.helsinki.fi/wp-content/uploads/Abstracts/Physics_Days_2015_Proceedings

M3 - Conference contribution

SN - 978-951-51-0584-4

BT - PROCEEDINGS OF THE XLIX ANNUAL CONFERENCE OF THE FINNISH PHYSICAL SOCIETY

ER -

Nolvi AM, Ylitalo TJ, Viitala TJS, Nyman J, Kassamakov IV, Sandler N et al. Optical 3D-imaging with nanometer vertical resolution. julkaisussa PROCEEDINGS OF THE XLIX ANNUAL CONFERENCE OF THE FINNISH PHYSICAL SOCIETY. 2015