Atomic Layer Deposition of Zirconium Dioxide from Zirconium Tetraiodide and Ozone

Press/media: !!Press / Media

Period	3 jan. 2018

Mediabevakning

Titel	Atomic Layer Deposition of Zirconium Dioxide from Zirconium Tetraiodide and Ozone
Medianamn/-företag	ECS Journal of Solid State Science and Technology
Land/Territorium	Förenta Staterna (USA)
Datum	03/01/2018
Webbadress	jss.ecsdl.org/cgi/content/short/7/2/P1?rss=1
Personer	Mikko Ritala, Markku Leskelä, Marianna Kemell