Matti Putkonen

Putkonen, M., Malm, J., Karppinen, M., Sajavaara, T., Sagari, A. R. A., Väisänen, M., Lehto, R., Timonen, J., Whitlow, H. J., Rahkila, P. & Cheng, S., 2009

Forskningsoutput: Bok/rapport › Beställd rapport

2006

ALD of HfO2 using a new organometallic Hf precursor, The AVS Topical Conference on Atomic Layer Deposition (ALD 2006)

Jones, A. C., O’Kane, R., Song, F., Heys, P., Williams, P. A., Niinistö, L., Niinistö, J., Putkonen, M., Hammond, R. & Bacon, A., 2006

Forskningsoutput: Bok/rapport › Beställd rapport

2005

Atomic Layer Deposition of Rare Earth Oxide Thin Films Exploiting Different Precursor Chemistries

Niinistö, L., Putkonen, M., Päiväsaari, J., Niinistö, J., Kosola, A., Nieminen, M., Dezellah, C. L. & Winter, C. H., 2005

Forskningsoutput: Bok/rapport › Beställd rapport

2004

2003

Atomic Layer Deposition of Erbium Oxide Thin Films

Päiväsaari, J., Putkonen, M., Sajavaara, T. & Niinistö, L., 2003

Forskningsoutput: Bok/rapport › Beställd rapport

Microstructural and electrical properties of gadolinium doped ceria thin films prepared by atomic layer deposition (ALD)

Gourba, E., Ringuedé, A., Cassir, M., Päiväsaari, J., Niinistö, J., Putkonen, M. & Niinistö, L., 2003

Forskningsoutput: Bok/rapport › Beställd rapport

2002

2001

Ion Beam Materials Analysis by Combining ERDA and RBS

Sajavaara, T., Rauhala, E., Arstila, M., Kemell, M., Putkonen, M. & Nieminen, M., 2001

Forskningsoutput: Bok/rapport › Beställd rapport

2000

1999

Hot Electron-Induced Electrochemiluminescence of Tb(III) Chelates at Optically Transparent Tunnel Emission Electrodes Prepared by Atomic Layer Epitaxy

Kulmala, S., Ala-Kleme, T., Helin, T., Väre, L., Putkonen, M. & Niinistö, L., 1999

Forskningsoutput: Bok/rapport › Beställd rapport

Matti Putkonen

ALD from emerging applications to industrial production: selected examples beyond IC technology

Industrial ALD Equipment for PV and OLED Applications

Properties of AlN Film Grown by Plasma Enhanced Atomic Layer Deposition

Pushing the limits of plasma ALD conformality

ALD for amino-functionalization of silicon surfaces using aminoalkoxysilanes and water

ALD of WO3 thin films on Si(100) surfaces from W(CO)6 and O3 precursors

Atomic layer deposition of lithium containing thin films

Beneq Oy, University of Jyväskylä and University of Helsinki Effects of ALD TiN on the Abrasion Resistance of Three Stainless Steel Grades

Crystallisation, wettability and bioactivity of Ca-P-O Films

ALD of HfO2 using a new organometallic Hf precursor, The AVS Topical Conference on Atomic Layer Deposition (ALD 2006)

Atomic Layer Deposition of Rare Earth Oxide Thin Films Exploiting Different Precursor Chemistries

Atomic layer deposition of rare earth oxides: erbium oxide films from b-diketonate and ozone precursors

Atomic Layer Deposition of Tantalum Nitride Applying a Mixed Amino/Imino Tantalum Precursor

Comparison of HfO2 Thin Films Grown by ALD Using Cp2Hf(CH3)2 and Water or Ozone as Precursors

Deposition of bismuth silicate thin films for buffer layers by atomic layer deposition

Growth of YScO3 thin films by atomic layer deposition

Reaction Mechanism Studies on ZrO2 Grown by ALD - A Comparison Between ZrCl4 and Cp2ZrMe2 Based Processes

Synthesis, structure and atomic layer deposition film growth studies of tris(amidinato)lanthanide(III) precursors

The atomic layer deposition of neodymium aluminate thin films

Atomic Layer Deposition of Erbium Oxide Thin Films

Microstructural and electrical properties of gadolinium doped ceria thin films prepared by atomic layer deposition (ALD)

Atomic layer deposition of Gd_(2)O_(3) and Ce_(1-x)Gd_(x)O_(2-0.5x) thin films

Controlled growth of neodymium oxide by atomic layer deposition

Magnesium aluminate thin films by atomic layer deposition from organometallic precursors and water

Ion Beam Materials Analysis by Combining ERDA and RBS

Cerium dioxide - a promising material for electronic and optical applications

Deposition of cerium dioxide buffer layers by atomic layer epitaxy

Growth of group 3 oxide thin films by atomic layer epitaxy

Low temperature ALE deposition of Y_(2)O_(3) thin films from beta-diketonate precursors

Hot Electron-Induced Electrochemiluminescence of Tb(III) Chelates at Optically Transparent Tunnel Emission Electrodes Prepared by Atomic Layer Epitaxy

Matti Putkonen

Publikationer

Sökresultat