Inget foto av Timo Hatanpää

Timo Hatanpää

  • PL 55 (A. I. Virtasen aukio 1)

    00014

    Finland

19992019

Forskningsoutput per år

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Publikationer

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Patent
2016

Atomic Layer Deposition of Metal Phosphates and Lithium Silicates

Hamalainen, J., Holopainen, J., Hatanpaa, T., Ritala, M. & Leskela, M., 19 apr 2016, Patentnr. US9315894 B2, 19 apr 2016

Forskningsoutput: Patent

2014

Metal oxide films

Rahtu, A. H., Matero, R., Leskelä, M., Ritala, M., Hatanpää, T. T., Hänninen, T. P. & Vehkamäki, M., 1 apr 2014, IPC-nr. C30B21/02, Patentnr. US8685165 B2, 1 apr 2014

Forskningsoutput: Patent

2013

Methods for Forming Thin Films Comprising Tellurium

Pore, V., Hatanpää, T. T., Ritala, M. & Leskelä, M., 12 feb 2013, IPC-nr. C23C16/06 , Patentnr. US8372483 (B2)

Forskningsoutput: Patent

Synthesis and Application for tellurium and selenium ald precursor film

Pore, V., Hatanpää, T. T., Ritala, M. & Leskelä, M., 25 dec 2013, IPC-nr. C23C16/06, H01L21/205, C23C16/44, C23C16/16, Patentnr. CN 102076882 B, 23 apr 2009, Prioritetsdatum 25 apr 2008

Forskningsoutput: Patent

2010

Synthesis and Use of Precursors for ALD of Tellurium and Selenium Thin Films.

Pore, V., Hatanpää, T. T., Ritala, M. & Leskelä, M., 14 jan 2010, IPC-nr. C23C 16/455, Patentnr. 2010/0009078 A1

Forskningsoutput: Patent

2007

Process for Producing Oxide Films

Hatanpää, T. T., Vehkamäki, M., Ritala, M. & Leskelä, M., 28 jun 2007, IPC-nr. C23C 16/06, Patentnr. US 7713584 , 11 maj 2010

Forskningsoutput: Patent

2005

Process for Producing Bismuth-Containing Oxide Films

Leskelä, M., Vehkamäki, M., Hatanpää, T. T. & Ritala, M., 28 apr 2005, IPC-nr. C23C16/00 C23C16/40 C23C16/06 , Patentnr. 7618681 , 17 nov 2009

Forskningsoutput: Patent