A computationally efficient method to solve the Takagi-Taupin equations for a large deformed crystal

Ari-Pekka Honkanen, Giulio Monaco, Simo Huotari

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We present a treatise on solving the Takagi-Taupin equations in the case of a strain field with an additional, spatially slowly varying component (owing to e.g. heat expansion or angular compression). We show that the presence of such a component in a typical case merely shifts the reflectivity curve as a function of wavelength or incidence angle, while having a negligible effect on its shape. On the basis of the derived result, we develop a computationally efficient method to calculate the reflectivity curve of a large deformed crystal. The validity of the method is demonstrated by compared computed reflectivity curves with experimental ones for bent silicon wafers. An excellent agreement is observed.
TidskriftJournal of Applied Crystallography
Sidor (från-till)1284–1289
Antal sidor6
StatusPublicerad - aug 2016
MoE-publikationstypA1 Tidskriftsartikel-refererad


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