A low-temperature thermal ALD process for nickel utilizing dichlorobis(triethylphosphine)nickel(ii) and 1,4-bis(trimethylgermyl)-1,4-dihydropyrazine

Anton Vihervaara; Timo Hatanpää; Kenichiro Mizohata; Mykhailo Chundak; Georgi Popov; Mikko Ritala

doi:10.1039/d2dt01347a

A low-temperature thermal ALD process for nickel utilizing dichlorobis(triethylphosphine)nickel(ii) and 1,4-bis(trimethylgermyl)-1,4-dihydropyrazine

Anton Vihervaara, Timo Hatanpää, Kenichiro Mizohata, Mykhailo Chundak, Georgi Popov, Mikko Ritala

Forskningsoutput: Tidskriftsbidrag › Artikel › Vetenskaplig › Peer review

Originalspråk	engelska
Tidskrift	Dalton Transactions
Volym	51
Nummer	29
Sidor (från-till)	10898-10908
Antal sidor	11
ISSN	1477-9226
DOI	https://doi.org/10.1039/d2dt01347a
Status	Publicerad - 26 juli 2022
MoE-publikationstyp	A1 Tidskriftsartikel-refererad

Vetenskapsgrenar

116 Kemi
216 Materialteknik

Åtkomst av dokument

10.1039/d2dt01347aLicens: CC BY

d2dt01347aSlutlig publicerad version, 2,98 MBLicens: CC BY

HelsinkiALD
Putkonen, M. (Chef), Ritala, M. (Chef), Mäntymäki, M. (Operatör), Kemell, M. (Operatör), Vehkamäki, M. (Operatör) & Heikkilä, M. (Operatör)
Avdelningen för kemi
Utrustning/facilitet: Forskningslaboratorium

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title = "A low-temperature thermal ALD process for nickel utilizing dichlorobis(triethylphosphine)nickel(ii) and 1,4-bis(trimethylgermyl)-1,4-dihydropyrazine",

keywords = "116 Chemical sciences, 216 Materials engineering",

author = "Anton Vihervaara and Timo Hatanp{\"a}{\"a} and Kenichiro Mizohata and Mykhailo Chundak and Georgi Popov and Mikko Ritala",

year = "2022",

month = jul,

day = "26",

doi = "10.1039/d2dt01347a",

language = "English",

volume = "51",

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TY - JOUR

T1 - A low-temperature thermal ALD process for nickel utilizing dichlorobis(triethylphosphine)nickel(ii) and 1,4-bis(trimethylgermyl)-1,4-dihydropyrazine

AU - Vihervaara, Anton

AU - Hatanpää, Timo

AU - Mizohata, Kenichiro

AU - Chundak, Mykhailo

AU - Popov, Georgi

AU - Ritala, Mikko

PY - 2022/7/26

Y1 - 2022/7/26

KW - 116 Chemical sciences

KW - 216 Materials engineering

U2 - 10.1039/d2dt01347a

DO - 10.1039/d2dt01347a

M3 - Article

C2 - 35792068

SN - 1477-9226

VL - 51

SP - 10898

EP - 10908

JO - Dalton Transactions

JF - Dalton Transactions

IS - 29

ER -

A low-temperature thermal ALD process for nickel utilizing dichlorobis(triethylphosphine)nickel(ii) and 1,4-bis(trimethylgermyl)-1,4-dihydropyrazine

Vetenskapsgrenar

Åtkomst av dokument

Utrustning

HelsinkiALD

Citera det här