Argon cluster impacts on layered silicon, silica, and graphite surfaces

Juha Samela; Kai Nordlund; Juhani Keinonen; V. N Popok; E. E. B Campbell

doi:10.1140/epjd/e2007-00104-y

Argon cluster impacts on layered silicon, silica, and graphite surfaces

Juha Samela, Kai Nordlund, Juhani Keinonen, V. N Popok, E. E. B Campbell

Forskningsoutput: Tidskriftsbidrag › Artikel › Vetenskaplig › Peer review

Sammanfattning

Seven structures of covalently bonded materials are used as targets of 6 keV Ar-12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.

Originalspråk	engelska
Tidskrift	European Physical Journal D. Atomic, Molecular, Optical and Plasma Physics
Volym	43
Nummer	1-3
Sidor (från-till)	181-184
Antal sidor	4
ISSN	1434-6060
DOI	https://doi.org/10.1140/epjd/e2007-00104-y
Status	Publicerad - 2007
MoE-publikationstyp	A1 Tidskriftsartikel-refererad

Åtkomst av dokument

10.1140/epjd/e2007-00104-y

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@article{acb1bbc079d94b209fcadd863da1c78e,

title = "Argon cluster impacts on layered silicon, silica, and graphite surfaces",

abstract = "Seven structures of covalently bonded materials are used as targets of 6 keV Ar-12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.",

author = "Juha Samela and Kai Nordlund and Juhani Keinonen and Popok, {V. N} and Campbell, {E. E. B}",

year = "2007",

doi = "10.1140/epjd/e2007-00104-y",

language = "English",

volume = "43",

pages = "181--184",

journal = "European Physical Journal D. Atomic, Molecular, Optical and Plasma Physics",

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T1 - Argon cluster impacts on layered silicon, silica, and graphite surfaces

AU - Samela, Juha

AU - Nordlund, Kai

AU - Keinonen, Juhani

AU - Popok, V. N

AU - Campbell, E. E. B

PY - 2007

Y1 - 2007

N2 - Seven structures of covalently bonded materials are used as targets of 6 keV Ar-12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.

AB - Seven structures of covalently bonded materials are used as targets of 6 keV Ar-12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.

U2 - 10.1140/epjd/e2007-00104-y

DO - 10.1140/epjd/e2007-00104-y

M3 - Article

VL - 43

SP - 181

EP - 184

JO - European Physical Journal D. Atomic, Molecular, Optical and Plasma Physics

JF - European Physical Journal D. Atomic, Molecular, Optical and Plasma Physics

SN - 1434-6060

IS - 1-3

ER -