Atomic layer deposition in nanotechnology applications

Markku Leskelä, Marianna Kemell, Markus Lautala, Tero Pilvi, Viljami Pore, Eero Santala, Mikko Ritala

Forskningsoutput: Kapitel i bok/rapport/konferenshandlingKonferensbidragVetenskapligPeer review


The self-limiting growth principle At. Layer Deposition (ALD) facilitates the deposition of conformal films on any size of substrates, including nano objects. ALD method can be used for prepn. of nanomaterials like nanotubes by using porous materials or nanofibers as templates, but more often it is used to modify nanomaterials. In this presentation the use of ALD for making and modifying nanomaterials is exemplified by two ways: deposition of thin films on inside walls of porous substrates and prepn. of nanotubes using nanofibres as templates. The materials deposited are oxide and metal films. High surface area substrates are of interest as capacitors in trench structure DRAM devices. Porous materials are challenge for ALD since the deposition times in flow-type reactors are usually unpractical long. Through porous substrates represent a different case and they can be coated fast if the precursors flows are forced to go through the pores. Through porous substrates coated with a metal film may be of interest in microelectronics, fuel cells, optics and membranes in sepn. The prepn. of nanotubes by ALD of a thin film on polymer nanofibers and firing of the fibers in air will be described. The nanofibers used have been cellulose, synthetic polymers fibers and electrospun polymer fibers. [on SciFinder(R)]
Titel på gästpublikationAbstracts of Papers : 234th ACS National Meeting
FörlagAmerican Chemical Society
StatusPublicerad - 2007
MoE-publikationstypA4 Artikel i en konferenspublikation
Evenemang234th ACS National Meeting - Boston, Förenta Staterna (USA)
Varaktighet: 19 aug 200723 aug 2007
Konferensnummer: 234

Bibliografisk information

M1 - Copyright (C) 2010 American Chemical Society (ACS). All Rights Reserved.

CAPLUS AN 2007:882781(Conference; Meeting Abstract; Computer Optical Disk)
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