Atomic Layer Deposition of Cobalt Oxide and Copper Oxide Thin Films

Tomi Iivonen

Forskningsoutput: Avhandling › Doktorsavhandling › Samling av artiklar

Originalspråk	engelska
Tilldelande institution	Helsingfors universitet
Handledare	Leskelä, Markku, Handledare Ritala, Mikko, Handledare
Utgivningsort	Helsinki
Förlag	Helsingin yliopisto
Tryckta ISBN	978-951-51-6380-6
Status	Publicerad - 2020
MoE-publikationstyp	G5 Doktorsavhandling (artikel)

Vetenskapsgrenar

@phdthesis{b9a93da0f8da4fde926a656198044f31,

title = "Atomic Layer Deposition of Cobalt Oxide and Copper Oxide Thin Films",

keywords = "116 Chemical sciences",

author = "Tomi Iivonen",

year = "2020",

language = "English",

isbn = "978-951-51-6380-6",

publisher = "Helsingin yliopisto",

address = "Finland",

school = "University of Helsinki",

}