Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films

Xinzhi Li; Marko Vehkamaki; Mikko Heikkila; Miika Mattinen; Matti Putkonen; Markku Leskela; Mikko Ritala

doi:10.3390/coatings11030355

Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films

Xinzhi Li, Marko Vehkamaki, Mikko Heikkila, Miika Mattinen, Matti Putkonen, Markku Leskela, Mikko Ritala

Forskningsoutput: Tidskriftsbidrag › Artikel › Vetenskaplig › Peer review

Originalspråk	engelska
Artikelnummer	355
Tidskrift	Coatings
Volym	11
Nummer	3
Antal sidor	13
ISSN	2079-6412
DOI	https://doi.org/10.3390/coatings11030355
Status	Publicerad - mars 2021
MoE-publikationstyp	A1 Tidskriftsartikel-refererad

Vetenskapsgrenar

221 Nanoteknologi

Åtkomst av dokument

10.3390/coatings11030355Licens: CC BY

coatings-11-00355-v2Slutlig publicerad version, 4,74 MBLicens: CC BY

HelsinkiALD
Putkonen, M. (Chef), Ritala, M. (Chef), Mäntymäki, M. (Operatör), Kemell, M. (Operatör), Vehkamäki, M. (Operatör) & Heikkilä, M. (Operatör)
Avdelningen för kemi
Utrustning/facilitet: Forskningslaboratorium

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@article{4a0ea631687640bbb8bf7c51f52d4060,

title = "Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films",

keywords = "ALD, MLD, nanolaminate films, low-k materials, 221 Nano-technology",

author = "Xinzhi Li and Marko Vehkamaki and Mikko Heikkila and Miika Mattinen and Matti Putkonen and Markku Leskela and Mikko Ritala",

year = "2021",

month = mar,

doi = "10.3390/coatings11030355",

language = "English",

volume = "11",

journal = "Coatings",

issn = "2079-6412",

publisher = "MDPI AG",

number = "3",

}

TY - JOUR

T1 - Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films

AU - Li, Xinzhi

AU - Vehkamaki, Marko

AU - Heikkila, Mikko

AU - Mattinen, Miika

AU - Putkonen, Matti

AU - Leskela, Markku

AU - Ritala, Mikko

PY - 2021/3

Y1 - 2021/3

KW - ALD

KW - MLD

KW - nanolaminate films

KW - low-k materials

KW - 221 Nano-technology

U2 - 10.3390/coatings11030355

DO - 10.3390/coatings11030355

M3 - Article

SN - 2079-6412

VL - 11

JO - Coatings

JF - Coatings

IS - 3

M1 - 355

ER -

Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films

Vetenskapsgrenar

Åtkomst av dokument

Utrustning

HelsinkiALD

Citera det här