Atomic Layer Deposition of Noble Metals

Titta Aaltonen; Mikko Ritala; Markku Leskelä

Atomic Layer Deposition of Noble Metals

Titta Aaltonen, Mikko Ritala, Markku Leskelä

Forskningsoutput: Kapitel i bok/rapport/konferenshandling › Konferensbidrag › Vetenskaplig › Peer review

Originalspråk	engelska
Titel på gästpublikation	Proceedings of Advanced Metallization Conference 2004
Redaktörer	D. Erb, P. Ramm, K. Masu, A. Osaki
Antal sidor	5
Utgivningsort	Warrensdale, PA
Förlag	Materials Research Society
Utgivningsdatum	2005
Sidor	663-667
ISBN (tryckt)	1558998144
Status	Publicerad - 2005
MoE-publikationstyp	A4 Artikel i en konferenspublikation
Evenemang	21st Advanced Metallization Conference - San Diego, Förenta Staterna (USA) Varaktighet: 19 okt 2004 → 21 okt 2004 Konferensnummer: AMC 2004

Publikationsserier

Namn	MRS Conference Proceedings Series
Volym	20

Vetenskapsgrenar

116 Kemi

Citera det här

@inproceedings{cd8f190a33fa440fa612e631a4bf3e6d,

title = "Atomic Layer Deposition of Noble Metals",

keywords = "116 Chemical sciences",

author = "Titta Aaltonen and Mikko Ritala and Markku Leskel{\"a}",

note = " Volume: Proceeding volume: ; 21st Advanced Metallization Conference ; Conference date: 19-10-2004 Through 21-10-2004",

year = "2005",

language = "English",

isbn = "1558998144",

series = "MRS Conference Proceedings Series",

publisher = "Materials Research Society",

pages = "663--667",

editor = "D. Erb and P. Ramm and K. Masu and A. Osaki",

booktitle = "Proceedings of Advanced Metallization Conference 2004",

address = "United States",

}

Atomic Layer Deposition of Noble Metals. / Aaltonen, Titta; Ritala, Mikko ; Leskelä, Markku.

Proceedings of Advanced Metallization Conference 2004. red. / D. Erb; P. Ramm; K. Masu; A. Osaki. Warrensdale, PA : Materials Research Society, 2005. s. 663-667 (MRS Conference Proceedings Series; Vol. 20).

Forskningsoutput: Kapitel i bok/rapport/konferenshandling › Konferensbidrag › Vetenskaplig › Peer review

TY - GEN

T1 - Atomic Layer Deposition of Noble Metals

AU - Aaltonen, Titta

AU - Ritala, Mikko

AU - Leskelä, Markku

N1 - Conference code: AMC 2004

PY - 2005

Y1 - 2005

KW - 116 Chemical sciences

M3 - Conference contribution

SN - 1558998144

T3 - MRS Conference Proceedings Series

SP - 663

EP - 667

BT - Proceedings of Advanced Metallization Conference 2004

A2 - Erb, D.

A2 - Ramm, P.

A2 - Masu, K.

A2 - Osaki, A.

PB - Materials Research Society

CY - Warrensdale, PA

T2 - 21st Advanced Metallization Conference

Y2 - 19 October 2004 through 21 October 2004

ER -