Atomic Layer Deposition of ScF3 and ScxAl yFz Thin Films

Elisa Atosuo; Mikko Heikkilä; Johanna Majlund; Leevi Pesonen; Miia Mäntymäki; Kenichiro Mizohata; Markku Leskelä; Mikko Ritala

doi:10.1021/acsomega.3c09147

Atomic Layer Deposition of ScF₃ and Sc_xAl _yF_z Thin Films

Elisa Atosuo, Mikko Heikkilä, Johanna Majlund, Leevi Pesonen, Miia Mäntymäki, Kenichiro Mizohata, Markku Leskelä, Mikko Ritala

Forskningsoutput: Tidskriftsbidrag › Artikel › Vetenskaplig › Peer review

Originalspråk	engelska
Tidskrift	ACS Omega
Volym	9
Nummer	10
Sidor (från-till)	11747–11754
Antal sidor	8
ISSN	2470-1343
DOI	https://doi.org/10.1021/acsomega.3c09147
Status	Publicerad - 12 mars 2024
MoE-publikationstyp	A1 Tidskriftsartikel-refererad

Vetenskapsgrenar

116 Kemi

Åtkomst av dokument

10.1021/acsomega.3c09147Licens: CC BY

atosuo-et-al-2024-atomic-layer-deposition-of-scf3-and-scxalyfz-thin-filmsSlutlig publicerad version, 4,89 MBLicens: CC BY

Citera det här

@article{7bfc45e8bd5b446c9de930e06dfb366f,

title = "Atomic Layer Deposition of ScF3 and ScxAl yFz Thin Films",

keywords = "Negative thermal-expansion, Phase-transitions, 116 Chemical sciences",

author = "Elisa Atosuo and Mikko Heikkil{\"a} and Johanna Majlund and Leevi Pesonen and Miia M{\"a}ntym{\"a}ki and Kenichiro Mizohata and Markku Leskel{\"a} and Mikko Ritala",

year = "2024",

month = mar,

day = "12",

doi = "10.1021/acsomega.3c09147",

language = "English",

volume = "9",

pages = "11747–11754",

journal = "ACS Omega",

issn = "2470-1343",

publisher = "American Chemical Society",

number = "10",

}

TY - JOUR

T1 - Atomic Layer Deposition of ScF3 and ScxAl yFz Thin Films

AU - Atosuo, Elisa

AU - Heikkilä, Mikko

AU - Majlund, Johanna

AU - Pesonen, Leevi

AU - Mäntymäki, Miia

AU - Mizohata, Kenichiro

AU - Leskelä, Markku

AU - Ritala, Mikko

PY - 2024/3/12

Y1 - 2024/3/12

KW - Negative thermal-expansion

KW - Phase-transitions

KW - 116 Chemical sciences

U2 - 10.1021/acsomega.3c09147

DO - 10.1021/acsomega.3c09147

M3 - Article

SN - 2470-1343

VL - 9

SP - 11747

EP - 11754

JO - ACS Omega

JF - ACS Omega

IS - 10

ER -